Title:
WORKING SURFACE CLEANING SYSTEM AND METHOD
Document Type and Number:
WIPO Patent Application WO2006036973
Kind Code:
A3
Abstract:
A method of cleaning the surface of a semiconductor tester/prober, as illustrated in Fig. 5 comprising visually inspecting the working surface of the prober with a microscope, brushing the surface of the prober to remove debris, and rinsing and drying the surface of the prober.
Inventors:
BROZ JERRY (US)
HUMPHREY ALAN E (US)
HUMPHREY ALAN E (US)
Application Number:
PCT/US2005/034636
Publication Date:
November 02, 2006
Filing Date:
September 28, 2005
Export Citation:
Assignee:
INTERNAT TEST SOLUTIONS (US)
BROZ JERRY (US)
HUMPHREY ALAN E (US)
BROZ JERRY (US)
HUMPHREY ALAN E (US)
International Classes:
A46B13/00; B08B7/00; A47L11/00
Foreign References:
| US5968282A | 1999-10-19 | |||
| US6280298B1 | 2001-08-28 | |||
| US6121058A | 2000-09-19 | |||
| US6777966B1 | 2004-08-17 | |||
| US6474350B1 | 2002-11-05 | |||
| US20030200989A1 | 2003-10-30 | |||
| US20010007421A1 | 2001-07-12 | |||
| JPH11145212A | 1999-05-28 |
Download PDF: