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Patent Searching and Data


Title:
WORKPIECE HOLDER AND WORKPIECE CUTTING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/017919
Kind Code:
A1
Abstract:
The present invention provides a workpiece holder that is used when cutting a workpiece using a wire saw. The workpiece holder is provided with: a workpiece plate that is adhered and fixed to a workpiece with a back plate interposed therebetween; and a holder body that supports the workpiece plate. In a case where, among radial directions of the workpiece, the direction parallel to the workpiece adhesion surface of the workpiece plate is the x-axis direction and a direction perpendicular the workpiece adhesive surface is the y-axis direction, the workpiece plate corrects misalignment of a crystallographic orientation axis of the workpiece in the x-axis direction and is adhered and fixed to the workpiece. The workpiece holder adjusts a y-axis direction inclination of the workpiece held by the workpiece plate by inclining the workpiece plate in the y-axis direction and is able to fix the workpiece plate and the workpiece to the holder body at the adjusted inclination. Due to this configuration, there are provided a workpiece holder and a method of cutting a workpiece using the workpiece holder that can realize cutting of an ingot having strict directional standards for an external setup system, without the use of a wire saw equipped with an orientation adjustment mechanism for a single crystal ingot.

Inventors:
WATANABE, Shiroyasu (596-2, Jyonokoshi, Kubiki-ku, Joetsu-sh, Niigata 93, 〒9420193, JP)
Application Number:
JP2016/003287
Publication Date:
February 02, 2017
Filing Date:
July 12, 2016
Export Citation:
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Assignee:
SHIN-ETSU HANDOTAI CO.,LTD. (2-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
International Classes:
B24B27/06; B28D5/04; B28D7/04; H01L21/304
Foreign References:
JPH11147217A1999-06-02
JP2000026200A2000-01-25
JP2015050215A2015-03-16
JP2001050912A2001-02-23
JP2004533347A2004-11-04
Attorney, Agent or Firm:
YOSHIMIYA, Mikio et al. (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
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