Title:
WORKPIECE HOLDING TOOL
Document Type and Number:
WIPO Patent Application WO/2018/066375
Kind Code:
A1
Abstract:
This workpiece holding tool that holds a workpiece, i.e., a subject to be processed, is provided with: a rotating body, on which a workpiece attached jig having the workpiece attached thereto is mounted, said rotating body rotating with the workpiece attached jig; a receiving member, in which a flow channel for supplying a fluid to an interface to the rotating body is formed, said receiving member receiving the rotating body; and a housing, which houses the receiving member, and in which a pressurization hole for supplying a pressurized fluid to the receiving member is formed. Consequently, the workpiece holding tool capable of stably rotating the workpiece and processing the workpiece having excellent surface accuracy is provided.
Inventors:
ISHIZAKI KOJI (JP)
KAWARABATA SATOSHI (JP)
KAWARABATA SATOSHI (JP)
Application Number:
PCT/JP2017/034119
Publication Date:
April 12, 2018
Filing Date:
September 21, 2017
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
B24B13/005; B24B13/02; B24B41/06
Foreign References:
| JP2001150341A | 2001-06-05 | |||
| JPH06226611A | 1994-08-16 | |||
| JPS63232959A | 1988-09-28 | |||
| JPS63120069A | 1988-05-24 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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