Title:
WORKPIECE MACHINING SHEET AND PRODUCTION METHOD FOR MACHINED WORKPIECE
Document Type and Number:
WIPO Patent Application WO/2019/111481
Kind Code:
A1
Abstract:
A workpiece machining sheet comprising a base material and an adhesive layer laminated on one surface side of the base material. The workpiece machining sheet is characterized by: the adhesive layer comprising an active energy ray curable adhesive; the oxygen atom ratio R0 being no more than 28 atom%, as measured by X ray photoelectron spectroscopy on a surface on the opposite side of the adhesive layer to the base material; and the oxygen atom ratio R100 being 20–29 atom%, as measured by X ray photoelectron spectroscopy at a position in the adhesive layer that is at a depth of 100 nm from the surface on the opposite side of the adhesive layer to the base material. Said workpiece machining sheet can adequately remove the adhesive by using running water and can adequately separate the workpiece after machining, said adhesive being derived from the adhesive layer attached to the workpiece after machining.
Inventors:
OGASAWARA TAKAFUMI (JP)
SAKAMOTO MISAKI (JP)
SAIKI NAOYA (JP)
SAKAMOTO MISAKI (JP)
SAIKI NAOYA (JP)
Application Number:
PCT/JP2018/033767
Publication Date:
June 13, 2019
Filing Date:
September 12, 2018
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/301; C09J133/04
Domestic Patent References:
| WO2016199787A1 | 2016-12-15 |
Foreign References:
| JP2013067708A | 2013-04-18 | |||
| JP2018172596A | 2018-11-08 |
Attorney, Agent or Firm:
HAYAKAWA Yuzi et al. (JP)
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