Title:
WORKPIECE PROCESSING DEVICE, GRINDING STONE, AND WORKPIECE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/270175
Kind Code:
A1
Abstract:
A rotatable disc-like grinding stone 5 comprises a convex grinding portion 5b in the outer peripheral portion thereof. The cross-sectional shape of the convex grinding portion 5b passing through a rotational axis 6 of the grinding stone 5 is convex toward the outer peripheral side. The grinding stone 5 is shaped with an arc-like portion 5e at least in each of both end portions thereof in the thickness direction. In order to form a disc-like workpiece 2 into a desired cross sectional shape, the workpiece 2 and the grinding stone 5 are arranged parallel to each other, the grinding stone 5 is rotated, and the workpiece 2 is rotated around a rotational axis 3 parallel to the rotational axis 6 of the grinding stone 5, while the grinding stone 5 is moved relative to the workpiece 2 according to a moving condition calculated on the basis of the curvature radius of the arc-like portion 5e of the grinding stone 5, such that a contact portion between the convex grinding portion 5b and the workpiece 2 moves along the desired cross-sectional shape of the workpiece 2. The curvature radius of the arc-like portion 5e of the grinding stone 5 is at least 10 times the thickness of the workpiece 2.
Inventors:
KATAYAMA ICHIRO (JP)
AOKI HIROTORA (JP)
AOKI HIROTORA (JP)
Application Number:
PCT/JP2022/020206
Publication Date:
December 29, 2022
Filing Date:
May 13, 2022
Export Citation:
Assignee:
KATAYAMA ICHIRO (JP)
AOKI HIROTORA (JP)
AOKI HIROTORA (JP)
International Classes:
B24B9/00; B24B53/053; B24B53/07; B24B55/00; B24D5/00; B24D5/14; H01L21/304
Foreign References:
JP2020171971A | 2020-10-22 | |||
JP2020171970A | 2020-10-22 | |||
JP2019198899A | 2019-11-21 | |||
JP2019166598A | 2019-10-03 | |||
JP2015223669A | 2015-12-14 | |||
JP2014220297A | 2014-11-20 | |||
JP2009142979A | 2009-07-02 | |||
JP2006021279A | 2006-01-26 | |||
JP2003025198A | 2003-01-29 | |||
JP2000042887A | 2000-02-15 | |||
JPH11345788A | 1999-12-14 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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