Title:
WORKPIECE PROCESSING DEVICE AND MANUFACTURING METHOD FOR PROCESSED WORKPIECES
Document Type and Number:
WIPO Patent Application WO/2018/181000
Kind Code:
A1
Abstract:
Provided are a workpiece processing device that includes a vaporizing device to vaporize a liquid to be vaporized having a comparatively large flow rate without requiring a carrier gas, and a manufacturing method for processed workpieces. A vaporizing device 1 comprises a vaporizing unit 10 that includes a heat storage body 11 having a heat capacity larger by a prescribed ratio than a carboxylic acid liquid Fq to be vaporized, and a heat supplier 20 that supplies heat to the vaporizing unit 10. The prescribed ratio is a heat capacity ratio in which a temperature decrease in the heat storage body 11 is within a predetermined range when the quantity of heat required when vaporizing the liquid Fq to be vaporized to a planned ratio by the liquid Fq to be vaporized flowing in a heat storage body channel 12 is transmitted from the heat storage body 11 to the liquid Fq to be vaporized. A workpiece processing device 100 comprises the vaporizing device 1, a chamber 5, and a vacuum pump 6 to create negative pressure in the chamber 5. A manufacturing method for processed workpieces performs prescribed processing on a workpiece W under the atmosphere of a processing gas Fg in the chamber 5 by loading the workpiece W into the chamber 5 and supplying the processing gas Fg generated with the vaporizing device 1 into the chamber 5.
More Like This:
| JPH069950 | MEDIUM FOR HEAT CARRYING SYSTEM |
| JPH05288485 | WASTE HEAT TEMPERATURE INCREASING AND RECOVERING DEVICE |
| WO/2021/048566 | TEMPERATURE SENSOR |
Inventors:
MATSUDA JUN (JP)
OKUBO TATSUO (JP)
OZAWA NAOTO (JP)
OKUBO TATSUO (JP)
OZAWA NAOTO (JP)
Application Number:
PCT/JP2018/011727
Publication Date:
October 04, 2018
Filing Date:
March 23, 2018
Export Citation:
Assignee:
ORIGIN ELECTRIC (JP)
International Classes:
F28D20/00; B23K1/008; B23K31/02
Domestic Patent References:
| WO2008015915A1 | 2008-02-07 |
Foreign References:
| JP2002210555A | 2002-07-30 | |||
| JP2007100207A | 2007-04-19 | |||
| JP2002208564A | 2002-07-26 | |||
| JPH10218134A | 1998-08-18 | |||
| JPH102616A | 1998-01-06 | |||
| JPS59108632U | 1984-07-21 | |||
| JPH08334266A | 1996-12-17 | |||
| US5318101A | 1994-06-07 | |||
| JP2015112603A | 2015-06-22 | |||
| JP2017068056A | 2017-04-06 |
Other References:
See also references of EP 3604999A4
Attorney, Agent or Firm:
MIYAGAWA, Teiji et al. (JP)
Download PDF: