Title:
X-RAY APPARATUS AND METHOD FOR MANUFACTURING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2019/117147
Kind Code:
A1
Abstract:
This X-ray apparatus is provided with: a first detector on which X-rays, including transmission X-rays that have passed through a target object or scattering X-rays scattered inside the target object, are incident, and which detects scattering positions at which the incident X-rays have scattered; a second detector on which the X-rays that have scattered inside or passed through the first detector are incident, and which detects the incident positions of the incident X-rays; and a specification unit for specifying the transmission X-rays, the scattering X-rays, or both on the basis of the scattering positions and the incident positions.
Inventors:
SUZUKI KAZUAKI (JP)
Application Number:
PCT/JP2018/045516
Publication Date:
June 20, 2019
Filing Date:
December 11, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N23/046; G01N23/201
Foreign References:
| JP5991519B2 | 2016-09-14 | |||
| JP2015138027A | 2015-07-30 | |||
| JP2017146102A | 2017-08-24 | |||
| US20080224061A1 | 2008-09-18 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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