Title:
X-RAY DETECTION DEVICE AND X-RAY FLUORESCENCE ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/183567
Kind Code:
A1
Abstract:
In this X-ray detection device, at least two first electrodes are disposed on a first main surface of a semiconductor substrate so as to not overlap with a first area of the semiconductor substrate. The first electrodes collect charge generated in the first area by X-rays. A second electrode is disposed on the first main surface, overlaps with the first area, and electrically separates the at least two first electrodes from each other. At least two third electrodes are disposed on the first main surface between the first electrodes and the second electrode and overlap with the first area. A fourth electrode is disposed on a second main surface of the semiconductor substrate.
Inventors:
TAKEMOTO YOSHIAKI (JP)
Application Number:
PCT/JP2019/009682
Publication Date:
September 17, 2020
Filing Date:
March 11, 2019
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G01T1/24; G01N23/223; G01T7/00
Domestic Patent References:
| WO2018225563A1 | 2018-12-13 | |||
| WO2017187971A1 | 2017-11-02 |
Foreign References:
| JP2014240770A | 2014-12-25 | |||
| JP2019015639A | 2019-01-31 | |||
| JP2014013894A | 2014-01-23 | |||
| US20140306120A1 | 2014-10-16 |
Attorney, Agent or Firm:
MATSUNUMA Yasushi et al. (JP)
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