Title:
X-RAY DEVICE, IMAGE FORMING METHOD, STRUCTURE MANUFACTURING METHOD, AND STRUCTURE MANUFACTURING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/002034
Kind Code:
A1
Abstract:
[Problem] To minimize the reduction of detection accuracy. [Solution] Provided is an X-ray device comprising an X-ray source 2 that emits X-rays XL; a detector 4 that detects the X-rays XL emitted from the X-ray source 2; and a processor 52 that reconstructs an image by performing correction that increases the value of first projection data obtained from a first region A1 in which an object to be measured, S, is present between the X-ray source 2 and the detector 4, and that decreases the value of second projection data obtained from a second region A2 in which the object to be measured, S, is not present between the X-ray source 2 and the detector 4, where the first region A1 and the second region A2 are regions of the detector 4.
More Like This:
| JP2002005856 | X-RAY FOREIGN MATTER DETECTOR |
| WO/1998/020366 | CODED APERTURE X-RAY IMAGING SYSTEM |
| WO/2005/111590 | NON-INTRUSIVE INSPECTION SYSTEMS FOR LARGE CONTAINER SCREENING AND INSPECTION |
Inventors:
AOKI TAKASHI (JP)
Application Number:
PCT/JP2014/067734
Publication Date:
January 07, 2016
Filing Date:
July 03, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N23/04
Domestic Patent References:
| WO2014050931A1 | 2014-04-03 |
Foreign References:
| JPH11113892A | 1999-04-27 | |||
| JP2003102719A | 2003-04-08 | |||
| JP2013056149A | 2013-03-28 | |||
| JPS6385482A | 1988-04-15 |
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
West Kazuya (JP)
West Kazuya (JP)
Download PDF: