X-RAY DEVICE AND MANUFACTURING METHOD OF STRUCTURE

Title:

X-RAY DEVICE AND MANUFACTURING METHOD OF STRUCTURE

Document Type and Number:

WIPO Patent Application WO/2014/181478

Kind Code:

A1

Abstract:

Provided is a device capable of avoiding reduced detection accuracy, and a manufacturing method of a structure. This detection device (1), which irradiates a subject (S) with X-rays and detects the X-rays transmitting through the subject, includes an X-ray source which emits X-rays, a table (3) which holds the subject, a detector (4) which detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device (5A) and a second guide device (5B) which guide movement of the table in a direction parallel to the optical axis (Zr) of the X-ray source while supporting the table. In this detection device, the guide plane (GP), which is parallel to the optical axis (Zr) and is the plane to which movement of the table is limited, passes through the inside of the detection region (DR) of transmitted X-rays of the detector.

Inventors:

WATANABE TAKASHI (JP)
HILTON DANIEL (BE)
HAWKER SAM (BE)

Application Number:

PCT/JP2013/063221

Publication Date:

November 13, 2014

Filing Date:

May 10, 2013

Export Citation:

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Assignee:

NIKON CORP (JP)
NIKON METROLOGY NV (BE)

International Classes:

G01N23/04; G01B15/04

Domestic Patent References:

WO2012057284A1

2012-05-03

Foreign References:

JP2010139454A	2010-06-24
JP2010210389A	2010-09-24
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JP2009014710A	2009-01-22
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US20090268869A1	2009-10-29
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Other References: