Title:
X-RAY DIFFRACTION DATA PROCESSING DEVICE AND X-RAY ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/171612
Kind Code:
A1
Abstract:
A peak two-dimensional detection data extraction unit 211 extracts two-dimensional detection data (peak two-dimensional detection data) of the diffracted X-ray Xb with the maximum X-ray intensity, from two-dimensional detection data of diffracted X-rays Xb obtained at a plurality of scanning angles 2θ/θ. Next, a peak position specifying unit 212 specifies the position (peak position) where the X-ray intensity is maximum, from the peak two-dimensional detection data. Then, data processing is performed using positional information on the peak position specified for the peak two-dimensional detection data.
Inventors:
OGI AYA (JP)
KOBAYASHI SHINTARO (JP)
KAJIYOSHI KOICHI (JP)
KOBAYASHI SHINTARO (JP)
KAJIYOSHI KOICHI (JP)
Application Number:
PCT/JP2023/008314
Publication Date:
September 14, 2023
Filing Date:
March 06, 2023
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/207; G01N23/2055
Domestic Patent References:
| WO2015152483A1 | 2015-10-08 |
Foreign References:
| JP2022126106A | 2022-08-30 | |||
| JP2013145188A | 2013-07-25 | |||
| JP2011108801A | 2011-06-02 | |||
| JP2011073957A | 2011-04-14 | |||
| JP2012112914A | 2012-06-14 | |||
| CN110767562A | 2020-02-07 |
Other References:
INABA KATSUHIKO: "14p-1B-4, X-ray diffraction analysis of functional oxide thin films", 76TH JSAP AUTUMN MEETING, 13 September 2015 (2015-09-13), pages 100000001 - 120, XP093090897, Retrieved from the Internet [retrieved on 20231012], DOI: 10.11470/jsapmeeting.2015.2_0_219
CRYSTALLINITY EVALUATION GROUP: "Crystallinity evaluation", RIGAKU - SMARTLAB GUIDANCE HELP, 28 April 2009 (2009-04-28), XP093090908, Retrieved from the Internet [retrieved on 20231012]
MIZUSAKI HIDEAKI: "Analysis Cases of Thin Film Materials Using a Multifunctional X-Ray Diffractometer", NAGANO PREFECTURAL TECHNOLOGY CENTER RESEARCH REPORT, no. 17, 1 March 2023 (2023-03-01), pages 92 - 97, XP093090918
CRYSTALLINITY EVALUATION GROUP: "Crystallinity evaluation", RIGAKU - SMARTLAB GUIDANCE HELP, 28 April 2009 (2009-04-28), XP093090908, Retrieved from the Internet
MIZUSAKI HIDEAKI: "Analysis Cases of Thin Film Materials Using a Multifunctional X-Ray Diffractometer", NAGANO PREFECTURAL TECHNOLOGY CENTER RESEARCH REPORT, no. 17, 1 March 2023 (2023-03-01), pages 92 - 97, XP093090918
Attorney, Agent or Firm:
YAMAMOTO Toshitake (JP)
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