Title:
X-RAY FLUORESCENCE ANALYZER
Document Type and Number:
WIPO Patent Application WO/2018/100873
Kind Code:
A1
Abstract:
Provided is an X-ray fluorescence analyzer that is capable of: high-precision analysis in which background components are removed; and rapid measurement. The X-ray fluorescence analyzer has: an X-ray source (100) that irradiates a primary X ray that generates a secondary X ray, irradiating same on to a specimen (101) surface at an irradiation diameter of at least 1 mm; a spectroscopic element (106) that splits the secondary X ray; a first detector (108) that measures the intensity of the secondary X ray split by the spectroscopic element; an energy-dispersive second detector (110) that measures the intensity of the secondary X ray without splitting same; a storage device (116) that pre-stores ratios for each background intensity included in measurement results from the first and second detectors; and a calculation device (118) that waveform-separates and calculates the background intensity from the measured intensity of the specimen as measured by the second detector, performs correction by deducting a value, being the separated background intensity multiplied by the ratio, from the measured intensity for the sample as measured by the first detector, and performs quantitative analysis.
Inventors:
SAKO YUKIO (JP)
Application Number:
PCT/JP2017/036183
Publication Date:
June 07, 2018
Filing Date:
October 04, 2017
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223; G01N23/207
Foreign References:
| JPS59214743A | 1984-12-04 | |||
| JPH1123495A | 1999-01-29 | |||
| JPH11160255A | 1999-06-18 | |||
| JP2008309807A | 2008-12-25 | |||
| JP2000193613A | 2000-07-14 | |||
| JPH10507532A | 1998-07-21 | |||
| JPH03285153A | 1991-12-16 | |||
| JPH05281163A | 1993-10-29 | |||
| JPH05107363A | 1993-04-27 |
Attorney, Agent or Firm:
HARUKA PATENT & TRADEMARK ATTORNEYS (JP)
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