X-RAY GENERATING APPARATUS AND METHOD OF CONTROLLING X-RAY GENERATING APPARATUS

Title:

X-RAY GENERATING APPARATUS AND METHOD OF CONTROLLING X-RAY GENERATING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2012/132156

Kind Code:

A1

Abstract:

The objective of the present invention is to radiate a plurality of X rays having different energies, and to inhibit dispersion in the energies of the generated X rays. An X-ray generating apparatus (14) provided in an X-ray inspection apparatus (10) radiates X rays, by having a charged particle beam for generating a plurality of X rays having different energies generated by a particle acceleration apparatus (20), and having the charged particle beam irradiated upon a target (22). A single-energy control apparatus (40) controls the particle acceleration apparatus (20) for each of the X rays having different energies, on the basis of an X-ray dose per unit target current, which is obtained from the measurement values of current to flow through the target (22) and X-ray dose to be radiated by the target (22) due to the irradiation of the charged particle beam onto the target (22).

Inventors:

AOI TATSUFUMI (JP)
KAMINO YUICHIRO (JP)
OGI YASUO (JP)
WATANABE AKIRA (JP)
SHIGEOKA NOBUYUKI (JP)

Application Number:

PCT/JP2011/080120

Publication Date:

October 04, 2012

Filing Date:

December 26, 2011

Export Citation:

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Assignee:

MITSUBISHI HEAVY IND LTD (JP)
AOI TATSUFUMI (JP)
KAMINO YUICHIRO (JP)
OGI YASUO (JP)
WATANABE AKIRA (JP)
SHIGEOKA NOBUYUKI (JP)

International Classes:

H05G2/00; H05G1/00; H05H9/00

Foreign References:

JP2006309968A	2006-11-09
JP2005340009A	2005-12-08
JP2005150054A	2005-06-09
JPH11160498A	1999-06-18
US20080211431A1	2008-09-04

Other References: