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Title:
X-RAY GENERATING DEVICE FOR PHASE IMAGING
Document Type and Number:
WIPO Patent Application WO/2019/172269
Kind Code:
A1
Abstract:
The present invention provides an X-ray tube which is for phase imaging and in which a stable operation as an X-ray tube is performed by securing and cooling a current passage of a metallic pattern part of an X-ray generation target and reducing the amount of heat generated due to electronic beams in a support substrate of the metallic pattern part. An embedded depth was inspected by configuring a structure in which a metal was filled into a wafer composed of a light element and acted as a support substrate while a bulk material wafer was a material acting as a target. By inspecting in detail an arrival range (R), a diffusion distance (XD), and the like of electrons irradiated as an electronic beam onto a wafer composed of a light element and acting as a support substrate and a metallic part for generating X-rays, the optimum ranges for the depth of the metallic pattern irradiated with the electronic beam and for an incident angle to a target/wafer on a pattern-formed side were calculated such that the amount of the X-rays generated from the metallic pattern would become large. Furthermore, a thermally conductible structure was achieved by bringing a cooling block cooled by a coolant into direct contact with the target/wafer irradiated with the electronic beam, through studies on a cooling structure.

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Inventors:
NAKANO Asao (77, 〒9808577, JP)
MOMOSE Atsushi (77, 〒9808577, JP)
Application Number:
JP2019/008682
Publication Date:
September 12, 2019
Filing Date:
March 05, 2019
Export Citation:
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Assignee:
TOHOKU UNIVERSITY (2-1-1 Katahira Aoba-ku Sendai-shi Miyagi, 77, 〒9808577, JP)
International Classes:
H01J35/08; G01N23/041; G21K5/02; G21K5/08; H01J35/06; H01J35/12
Foreign References:
JP2015207559A2015-11-19
JP2017162555A2017-09-14
JP2018029777A2018-03-01
JP2004235113A2004-08-19
Attorney, Agent or Firm:
SASAKI Ko (110-2 Iwase Matsudo-shi Chiba, 76, 〒2710076, JP)
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