Title:
X-RAY GENERATION DEVICE, X-RAY DEVICE, AND METHOD FOR MANUFACTURING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2015/145668
Kind Code:
A1
Abstract:
An X-ray generation device in which an electron beam emitted from a cathode reaches a target, whereby X-rays are released, wherein the X-ray generation device has first and second high-voltage power supplies that are serially connected between the cathode and the target and that accelerate the electron beam, the second high-voltage power supply outputting a second high voltage so that the phase of a fluctuation component of the second high voltage, which is generated by the second high-voltage power supply has a predetermined relationship relative to the phase of the fluctuation component of a first high voltage, which is generated by the first high-voltage power supply.
Inventors:
ENDO TAKESHI (JP)
MIURA SATOSHI (JP)
MIURA SATOSHI (JP)
Application Number:
PCT/JP2014/058883
Publication Date:
October 01, 2015
Filing Date:
March 27, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
H05G1/32; H01J35/06; H05G1/00
Foreign References:
| US4216382A | 1980-08-05 | |||
| JPH1041093A | 1998-02-13 | |||
| JPH07306165A | 1995-11-21 | |||
| JPS62143398A | 1987-06-26 | |||
| JPH05242993A | 1993-09-21 |
Other References:
See also references of EP 3128818A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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