Title:
X-RAY GUIDE TUBE PRODUCTION METHOD, X-RAY GUIDE TUBE, AND ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/137047
Kind Code:
A1
Abstract:
The present invention increases X-ray transmission efficiency in an X-ray guide tube. This X-ray guide tube production method produces an X-ray guide tube 29 for emitting X-rays incident from an X-ray source, and comprises the following steps: a step for preparing a capillary body 29a that has an internal capillary space 32 to which X-rays are incident; and a step for forming a thin metal film 33 on an inner circumferential surface 32a by using atomic layer deposition.
Inventors:
NII HAJIME (JP)
Application Number:
PCT/JP2019/037472
Publication Date:
July 02, 2020
Filing Date:
September 25, 2019
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
G21K1/06; G01N23/223; G21K5/02
Foreign References:
| US20130280421A1 | 2013-10-24 | |||
| JP2006242732A | 2006-09-14 | |||
| JPH11295498A | 1999-10-29 | |||
| JP2013508735A | 2013-03-07 | |||
| JP2014038034A | 2014-02-27 |
Attorney, Agent or Firm:
WATANABE, Hisashi et al. (JP)
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