Title:
X-RAY IN-LINE INSPECTION METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/003329
Kind Code:
A1
Abstract:
The objective of the present invention is to provide an X-ray in-line inspection method for determining whether there is an internal defect from a small, limited number of transmission images and, if there is an internal defect, quickly evaluating detailed information about the internal defect, such as the three-dimensional shape, volume, and position of the internal defect. This objective is achieved by an X-ray in-line inspection method using an X-ray in-line inspection device comprising a radiation source (1), a detector (2), a drive mechanism (4) for moving an object under test between the radiation source and detector, a signal processing circuit (5) for quantifying the radiation transmission amounts measured by the detector, and a computation device (6) for composing images on the basis of a signal for the quantified radiation transmission amounts, the X-ray in-line inspection method being characterized in that transmission images are initially imaged at precise angles, transmission images are then acquired only at limited angles, the amount of difference between the transmission images acquired at precise angles and limited angles is used to determine whether there is an internal defect, and if a determination is made that there is an internal defect, the shape of the internal defect is evaluated through image reconstruction accomplished through interpolation correction on the detailed transmission images of internal defect influence amounts obtained using the transmission images at the limited angles.
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Inventors:
SADAOKA NORIYUKI (JP)
Application Number:
PCT/JP2017/023685
Publication Date:
January 03, 2019
Filing Date:
June 28, 2017
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01N23/04; G01N23/18
Foreign References:
| JP2007170926A | 2007-07-05 | |||
| JPS5981544A | 1984-05-11 |
Attorney, Agent or Firm:
TODA Yuji (JP)
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