Title:
X-RAY INSPECTION DEVICE AND METHOD FOR X-RAY INSPECTION
Document Type and Number:
WIPO Patent Application WO/2010/029862
Kind Code:
A1
Abstract:
An X-ray inspection device (100) is equipped with a scanning type X-ray source (10) that outputs X-rays, an X-ray detector driving unit (22) on which a plurality of X-ray detectors (23) are set and which can independently drive the plurality of the X-ray detectors (23), and an image acquisition control mechanism (30) which controls the acquisition of image data from the X-ray detector driving unit (22) or the X-ray detectors (23). In regard to each X-ray detectors (23), the scanning type X-ray source (10) moves an X-ray focus position of the X-ray source to each of radiation starting points of the X-rays that are set to penetrate a plurality of predetermined inspection areas of an inspection subject (20) and that are set to be incident on each X-ray detector (23), and radiates the X-ray. The image-pickup of the X-ray detectors (23) and the movement of the other X-ray detectors (23) that do not to pick up images are alternately carried out in parallel. The image acquisition control mechanism (30) acquires image data detected by the X-ray detectors (23) and a calculation unit (70) carries out the reconstruction of an image in the inspection area in accordance with the image data.
Inventors:
SUGITA, Shinji (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
杉田 信治 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 オムロン株式会社内 Kyoto, 〒6008530, JP)
KATO, Noriyuki (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
加藤 訓之 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 オムロン株式会社内 Kyoto, 〒6008530, JP)
杉田 信治 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 オムロン株式会社内 Kyoto, 〒6008530, JP)
KATO, Noriyuki (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
加藤 訓之 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 オムロン株式会社内 Kyoto, 〒6008530, JP)
Application Number:
JP2009/065064
Publication Date:
March 18, 2010
Filing Date:
August 28, 2009
Export Citation:
Assignee:
OMRON CORPORATION (801 Minamifudodo-cho, Horikawahigashiiru Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
オムロン株式会社 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 Kyoto, 〒6008530, JP)
SUGITA, Shinji (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
杉田 信治 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 オムロン株式会社内 Kyoto, 〒6008530, JP)
KATO, Noriyuki (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
オムロン株式会社 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 Kyoto, 〒6008530, JP)
SUGITA, Shinji (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
杉田 信治 (〒30 京都府京都市下京区塩小路通堀川東入南不動堂町８０１番地 オムロン株式会社内 Kyoto, 〒6008530, JP)
KATO, Noriyuki (801 Minamifudodo-cho, Horikawahigashiiru, Shiokoji-dori, Shimogyo-ku, Kyoto-sh, Kyoto 30, 〒6008530, JP)
International Classes:
G01N23/04
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (Fukami Patent Office, Nakanoshima Central Tower 22nd Floor,2-7, Nakanoshima 2-chome, Kita-k, Osaka-shi Osaka 05, 〒5300005, JP)