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Title:
X-RAY INSPECTION METHOD AND X-RAY INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/074031
Kind Code:
A1
Abstract:
An X-ray inspection apparatus (100) is provided with: an X-ray source (10); an X-ray detector (23); an image acquisition control mechanism (30) which controls acquisition of image data from the X-ray detector (23); an inspected object driving mechanism (20) which moves an inspected object (1); an X-ray source control mechanism (60); and a computing unit (70).  The X-ray source control mechanism (60) makes the X-ray source (10) output an X-ray from focal point positions arranged in the X-direction, based on the instruction given from the computing unit (70).  The inspected object (1) is divided into a plurality of partial regions.  The image acquisition control mechanism (30) outputs each focal point position, and acquires partial images, i.e., the images formed by the X-rays passed through the partial regions.  When the acquisition of the partial images of all the focal point positions is completed, the inspected object driving mechanism (20) moves the inspected object (1) in the Y-direction, based on the instruction given from the computing unit (70).

Inventors:
SUGITA SHINJI (JP)
MASUDA MASAYUKI (JP)
Application Number:
PCT/JP2009/071244
Publication Date:
July 01, 2010
Filing Date:
December 21, 2009
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
SUGITA SHINJI (JP)
MASUDA MASAYUKI (JP)
International Classes:
G01N23/04; H05G1/00
Domestic Patent References:
WO2007051587A22007-05-10
Foreign References:
JPS61155845A1986-07-15
JPS56136529A1981-10-24
JPS5425190A1979-02-24
JPH0377008A1991-04-02
JP2001351551A2001-12-21
JPS614139A1986-01-10
US6628745B12003-09-30
JP2009080055A2009-04-16
JP2006322799A2006-11-30
JP2004108990A2004-04-08
JP2005135693A2005-05-26
JP2001076656A2001-03-23
JPS5994349A1984-05-31
JPS5423492A1979-02-22
JP2005321282A2005-11-17
JP2005080750A2005-03-31
JP2007127668A2007-05-24
JP2006177760A2006-07-06
Other References:
See also references of EP 2378280A4
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (JP)
Hisao Fukami (JP)
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