Title:
X-RAY IRRADIATION DEVICE AND ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/122020
Kind Code:
A1
Abstract:
Provided are a X-ray irradiation device capable of adjusting the energy of X-rays over a wide range, and an analysis device provided with the X-ray irradiation device. In the X-ray irradiation device, X-rays emitted from a X-ray generation mechanism are focused on a predetermined focal point by a light focusing mechanism. The X-ray generation mechanism is comprised of a structure for generating several types of X-ray having different wavelengths. The light focusing mechanism is comprised of a structure in which the X-rays are focused on the same focal point by light focusing elements having diffraction characteristics suitable for the wavelengths of the X-rays generated by the X-ray generation mechanism.
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Inventors:
YAMAZUI HIROMICHI (JP)
KOBAYASHI KEISUKE (JP)
IWAI HIDEO (JP)
KOBATA MASAAKI (JP)
KOBAYASHI KEISUKE (JP)
IWAI HIDEO (JP)
KOBATA MASAAKI (JP)
Application Number:
PCT/JP2011/001904
Publication Date:
October 06, 2011
Filing Date:
March 30, 2011
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE (JP)
ULVAC PHI INC (JP)
YAMAZUI HIROMICHI (JP)
KOBAYASHI KEISUKE (JP)
IWAI HIDEO (JP)
KOBATA MASAAKI (JP)
ULVAC PHI INC (JP)
YAMAZUI HIROMICHI (JP)
KOBAYASHI KEISUKE (JP)
IWAI HIDEO (JP)
KOBATA MASAAKI (JP)
International Classes:
G01N23/227; H05G2/00; H05G1/70
Foreign References:
| JPH11281597A | 1999-10-15 | |||
| JP2009500642A | 2009-01-08 | |||
| JPH07325052A | 1995-12-12 | |||
| JPH0453548U | 1992-05-07 | |||
| JP2005216578A | 2005-08-11 | |||
| JP2001351551A | 2001-12-21 | |||
| JP2002228609A | 2002-08-14 | |||
| JPH07325052A | 1995-12-12 | |||
| JP2001133421A | 2001-05-18 |
Other References:
MASAAKI KOBATA ET AL.: "Development of the Hard-X-ray Angle Resolved X-ray Photoemission Spectrometer for Laboratory Use", ANALYTICAL SCIENCES, vol. 26, February 2010 (2010-02-01), pages 227 - 232
J. A. BERDEN: "X-Ray Wavelengths", REVIEW OF MODERN PHYSICS, vol. 39, no. 1, 1967, pages 78 - 124
J. A. BERDEN: "X-Ray Wavelengths", REVIEW OF MODERN PHYSICS, vol. 39, no. 1, 1967, pages 78 - 124
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
Omori Junichi (JP)
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Claims:
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