Title:
X-RAY METROLOGY SYSTEM WITH BROADBAND LASER PRODUCED PLASMA ILLUMINATOR
Document Type and Number:
WIPO Patent Application WO/2019/139837
Kind Code:
A1
Abstract:
Methods and systems for x-ray based semiconductor metrology utilizing a broadband, soft X-ray illumination source are described herein. A laser produced plasma (LPP) light source generates high brightness, broadband, soft x-ray illumination. The LPP light source directs a highly focused, short duration laser source to a non-metallic droplet target in a liquid or solid state. In one example, a droplet generator dispenses a sequence of nominally 50 micron droplets of feed material at a rate between 50 and 400 kilohertz. In one aspect, the duration of each pulse of excitation light is less than one nanosecond. In some embodiments, the duration of each pulse of excitation light is less than 0.5 nanoseconds. In some embodiments, the LPP light source includes a gas separation system that separates unspent feed material from other gases in the plasma chamber and provides the separated feed material back to the droplet generator.
Inventors:
KHODYKIN OLEG (US)
BYKANOV ALEXANDER (US)
BYKANOV ALEXANDER (US)
Application Number:
PCT/US2019/012449
Publication Date:
July 18, 2019
Filing Date:
January 07, 2019
Export Citation:
Assignee:
KLA TENCOR CORP (US)
International Classes:
H01S5/00; H01L21/67; H01S5/02
Domestic Patent References:
| WO2008094462A1 | 2008-08-07 |
Foreign References:
| US20130256568A1 | 2013-10-03 | |||
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| US20150041659A1 | 2015-02-12 | |||
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Other References:
MULLER ET AL.: "Emission properties of ns and ps laser-induced soft x-ray sources using pulsed gas jets", OPT. EXPRESS, vol. 21, 2013, pages 12831 - 12842
FLETTNER A ET AL.: "Applied Physics B: Lasers and Optics", 1 December 2003, SPRINGER INTERNATIONAL, article "High-harmonic generation and plasma radiation from water microdroplets"
FLETTNER A ET AL.: "Applied Physics B: Lasers and Optics", 1 December 2003, SPRINGER INTERNATIONAL, article "High-harmonic generation and plasma radiation from water microdroplets"
Attorney, Agent or Firm:
MCANDREWS, Kevin et al. (US)
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