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Title:
X-RAY SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2018/211664
Kind Code:
A1
Abstract:
This X-ray spectrometer is provided with: an excitation source 12 for irradiating excitation rays onto an irradiation area A of a sample S, a diffraction member 14 provided so as to face the irradiation area A, a slit member 13 that is provided between the irradiation area A and diffraction member 14 and has a slit parallel to the irradiation area A and a prescribed surface of the diffraction member 14, an X-ray linear sensor 15 having a light incidence surface constituted by a plurality of detection elements arranged in a direction perpendicular to the longitudinal direction of the slit, a first movement mechanism for changing the angle between the sample surface and the prescribed surface and/or the distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction, and a second movement mechanism for positioning the X-ray linear sensor on the path of characteristic X-rays that have passed through the slit and been diffracted by the prescribed surface by moving the X-ray linear sensor within a plane perpendicular to the longitudinal direction.

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Inventors:
SATO KENJI (JP)
IZUMI TAKURO (JP)
Application Number:
PCT/JP2017/018701
Publication Date:
November 22, 2018
Filing Date:
May 18, 2017
Export Citation:
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Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N23/223; G01N23/207
Domestic Patent References:
WO2016103834A12016-06-30
Foreign References:
JP2002189004A2002-07-05
JPH0382943A1991-04-08
JP2003098126A2003-04-03
JPS5788354A1982-06-02
JP2008309742A2008-12-25
JP2002214165A2002-07-31
JP2002214167A2002-07-31
JP2013096750A2013-05-20
JP2002189004A2002-07-05
Other References:
HISASHI HAYASHI: "Progress of X-ray analysis, Japan Society for Analytical Chemistry, X-ray Analysis Research Meeting", vol. 46, 31 March 2015, AGNE TECHNOLOGY CENTER, article "Chemistry analysis of Cr and Fe compounds by laboratory, single crystal type, high resolution X-ray spectrometer", pages: 187 - 201
I. ZAHARIEVA: "Journal of Physics: Conference Series", vol. 190, 5 November 2009, BRITISH PHYSICAL SOCIETY, article "Towards a comprehensive X-ray approach for studying the photosynthetic manganese complex - XANES, Kα/Kβ/Kβ-satellite emission lines, RIXS, and comparative computational approaches for selected model complexes"
KENJI SAKURAIHIROMI EBA: "Nuclear Instruments and Methods in Physics Research Section B", January 2003, ELSEVIER B. V, article "Chemical characterization using relative intensity of manganese Kβ' and Kβ5 X-ray fluorescence", pages: 199,391 - 395
See also references of EP 3627146A4
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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