Title:
X-RAY STRESS MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/015046
Kind Code:
A1
Abstract:
An X-ray stress measuring device for measuring the stress of a sample is provided with: a pair of X-ray generating means (10, 11, 10', 11') for emitting X-ray beams, the angle formed by both of the beams forming an arbitrary fixed angle in a plane inclined at a desired angle relative to the surface of the sample to be measured; an X-ray sensor unit (20) for detecting a plurality of Debye rings (C, C') generated by the incident X-ray beams from the pair of X-ray generating means; and a battery (410) for supplying the necessary power to each part of the device. Furthermore, the X-ray sensor unit comprises only a single two-dimensional (area) X-ray detector (20) or a one-dimensional (linear) X-ray detector (20'), the plurality of Debye rings generated by the incident X-ray beams (X-ray, X'-ray) from at least one pair of X-ray generating means are disposed in adjacent or intersecting positions, and the plurality of Debye rings caused by the X-ray, X'-ray are detected in common.
Inventors:
TORAYA Hideo (3-9-12 Matsubara-cho, Akishima-sh, Tokyo 66, 〒1968666, JP)
虎谷 秀穂 (〒66 東京都昭島市松原町三丁目９番１２号 株式会社リガク内 Tokyo, 〒1968666, JP)
虎谷 秀穂 (〒66 東京都昭島市松原町三丁目９番１２号 株式会社リガク内 Tokyo, 〒1968666, JP)
Application Number:
JP2011/067517
Publication Date:
February 02, 2012
Filing Date:
July 29, 2011
Export Citation:
Assignee:
RIGAKU CORPORATION (3-9-12, Matsubara-cho Akishima-sh, Tokyo 66, 〒1968666, JP)
株式会社リガク (〒66 東京都昭島市松原町三丁目９番１２号 Tokyo, 〒1968666, JP)
TORAYA Hideo (3-9-12 Matsubara-cho, Akishima-sh, Tokyo 66, 〒1968666, JP)
株式会社リガク (〒66 東京都昭島市松原町三丁目９番１２号 Tokyo, 〒1968666, JP)
TORAYA Hideo (3-9-12 Matsubara-cho, Akishima-sh, Tokyo 66, 〒1968666, JP)
International Classes:
G01L1/25; G01N23/20
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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Claims: