Title:
X-RAY TUBE AND X-RAY DETECTOR
Document Type and Number:
WIPO Patent Application WO/2020/122257
Kind Code:
A1
Abstract:
Provided are an X-ray tube and an X-ray detector that can bring a target as close as possible to a sample. The X-ray tube comprises: an electron generation unit; an electron acceleration unit that accelerates electrons generated by the electron generation unit with a voltage; a target with which the accelerated electrons collide so that X-rays are generated; a tubular body part in which the electron generation unit is disposed; a narrow-tube part which has a smaller outer diameter than the tubular body part and communicates with the tubular body part, and through which the accelerated electrons pass the inside thereof along a longitudinal direction; and a magnetic field lens part that focuses the electrons passing through the inside of the narrow-tube part by means of a magnetic field, wherein the target is disposed at a tip portion of the narrow-tube part, and the distance from the electron generation unit to the target along the longitudinal direction of the narrow-tube part exceeds three times the largest outer diameter of the tubular body part from the electron generation unit to the target along the longitudinal direction of the narrow-tube part.
Inventors:
AWATA SHOGO (JP)
AOYAMA JUNICHI (JP)
MIZUTA MASAO (JP)
AOYAMA JUNICHI (JP)
MIZUTA MASAO (JP)
Application Number:
PCT/JP2019/049162
Publication Date:
June 18, 2020
Filing Date:
December 16, 2019
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
H01J35/08; G01N23/223; G21K5/02; G21K5/08; H01J35/14; H01J35/16; H01J35/32
Foreign References:
JPS58145049A | 1983-08-29 | |||
JPH09505686A | 1997-06-03 | |||
US20180286623A1 | 2018-10-04 | |||
JP2016536771A | 2016-11-24 | |||
JPS4734508B1 | 1972-08-31 | |||
JP2007134325A | 2007-05-31 | |||
JP2015130334A | 2015-07-16 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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