Title:
XY STAGE
Document Type and Number:
WIPO Patent Application WO/2006/088098
Kind Code:
A1
Abstract:
An XY stage two-dimensionally controlling the positions of slider parts on a lattice platen, comprising the plurality of slider parts controllably positioned independent of each other. Each of the plurality of slider parts comprises a position control part controlling the positions of the slider parts in X- and Y-directions and a yawing correction part correcting the yawing of the slider parts around a Z-axis.
Inventors:
NIKAIDO MITSUHIRO (JP)
KOIZUMI YUTAKA (JP)
KAIHO FUMIO (JP)
KOIZUMI YUTAKA (JP)
KAIHO FUMIO (JP)
Application Number:
PCT/JP2006/302743
Publication Date:
August 24, 2006
Filing Date:
February 16, 2006
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP (JP)
NIKAIDO MITSUHIRO (JP)
KOIZUMI YUTAKA (JP)
KAIHO FUMIO (JP)
NIKAIDO MITSUHIRO (JP)
KOIZUMI YUTAKA (JP)
KAIHO FUMIO (JP)
International Classes:
G05D3/12; G03F9/00; G12B5/00; H01L21/027; H01L21/68
Foreign References:
| JP2005025695A | 2005-01-27 | |||
| JP2000065970A | 2000-03-03 | |||
| JP2002116239A | 2002-04-19 | |||
| JP2001350525A | 2001-12-21 | |||
| JP2004146807A | 2004-05-20 | |||
| JP2004120861A | 2004-04-15 | |||
| JP2003250295A | 2003-09-05 | |||
| JPH09121558A | 1997-05-06 |
Other References:
See also references of EP 1852763A4
Attorney, Agent or Firm:
Naito, Teruo (7-13 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 03, JP)
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