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Title:
Z-AXIS STRUCTURE IN ACCELEROMETER
Document Type and Number:
WIPO Patent Application WO/2016/119418
Kind Code:
A1
Abstract:
A Z-axis structure in an accelerometer comprises a mass block (1) moving relative to a substrate (4) in a Z-axis direction in a reciprocating manner. A first movable electrode plate (10) and a second movable electrode plate (11) are disposed on a sidewall of the mass block (1). A first fixed electrode plate (20) and a second fixed electrode plate (30) extending toward a plane consisting of an X axis and a Y axis are also disposed on the sidewall of the mass block (1). According to the Z-axis accelerometer, a lower plate structure is discarded, therefore the limitation of a lower plate to the Z-axis accelerometer is avoided, the mass block (1) can move up and down in the Z-axis direction, rather than moving in a teeterboard moving manner, the parasitic capacitance of the Z-axis accelerometer is reduced, and the detection precision is improved; the contact between the movable mass block (1) and the substrate (4) is avoided, and therefore the chip reliability is improved; the mass block (1) and the fixed electrodes are located at a same layer, therefore the consistence is superior to that of the traditional Z-axis structure; in addition, anchor points can be centralized in design, so as to reduce the sensitivity of a chip to the changes of the temperature and stress.

Inventors:
FANG HUABIN (CN)
SONG QINGLIN (CN)
SUN YANMEI (CN)
Application Number:
PCT/CN2015/084969
Publication Date:
August 04, 2016
Filing Date:
July 23, 2015
Export Citation:
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Assignee:
GOERTEK INC (CN)
International Classes:
G01P15/125
Domestic Patent References:
WO2006098794A22006-09-21
Foreign References:
CN104614553A2015-05-13
CN1605871A2005-04-13
CN102798734A2012-11-28
CN1828223A2006-09-06
US20060272414A12006-12-07
Attorney, Agent or Firm:
BEYOND TALENT PATENT AGENT FIRM (CN)
北京博雅睿泉专利代理事务所(特殊普通合伙) (CN)
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