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Title:
Z-PINCH PLASMA X-RAY SOURCE USING SURFACE DISCHARGE PREIONIZATION
Document Type and Number:
WIPO Patent Application WO2001078469
Kind Code:
A3
Abstract:
A Z-pinch plasma X-ray source includes a chamber having an insulating wall and defining a pinch region, a pinch anode and a pinch cathode positioned at opposite ends of the pinch region, a first conductor defining an edge in close proximity to or contacting an inside surface of the insulating wall and a second conductor disposed around an outside surface of the insulating wall. A surface discharge is produced on the inside surface of the insulating wall in response to application of a voltage to the first and second conductors. The surface discharge causes the gas to ionize and to form a plasma shell near the inside surface of the insulating wall. The pinch anode and the pinch cathode produce a current through the plasma shell in an axial direction and produce an azimuthal magnetic field in the pinch region in response to application of a high energy electric pulse to the pinch anode and the pinch cathode. The azimuthal magnetic field causes the plasma shell to collapse to the central axis and to generate X-rays.

Inventors:
MCGEOCH MALCOLM W
Application Number:
US0109964W
Publication Date:
February 28, 2002
Filing Date:
March 28, 2001
Export Citation:
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Assignee:
PLEX LLC
International Classes:
H05G2/00; (IPC1-7): H05G2/00
Foreign References:
US5504795A1996-04-02
US5142166A1992-08-25
US5763930A1998-06-09
US5134641A1992-07-28
Other References:
MCGEOCH M: "RADIO-FREQUENCY-PREIONIZED XENON Z-PINCH SOURCE FOR EXTREME ULTRAVIOLET LITHOGRAPHY" APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA,WASHINGTON, US, vol. 37, 20 March 1998 (1998-03-20), pages 1651-1658, XP000996996 ISSN: 0003-6935
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