Title:
ZINC OXIDE SINTERED COMPACT, SPUTTERING TARGET, AND ZINC OXIDE THIN FILM
Document Type and Number:
WIPO Patent Application WO/2012/077512
Kind Code:
A1
Abstract:
Provided are a zinc oxide sintered compact with a zirconium content of 10-1,000 ppm and a sputtering target comprising the zinc oxide sintered compact. Also provided is a zinc oxide thin film with a zirconium content of 10-2,000 ppm and a resistivity of 10 Ω・cm or more.
Inventors:
MESUDA MASAMI (JP)
KURAMOCHI HIDETO (JP)
IIGUSA HITOSHI (JP)
OMI KENJI (JP)
SHIBUTAMI TETSUO (JP)
KURAMOCHI HIDETO (JP)
IIGUSA HITOSHI (JP)
OMI KENJI (JP)
SHIBUTAMI TETSUO (JP)
Application Number:
PCT/JP2011/077232
Publication Date:
June 14, 2012
Filing Date:
November 25, 2011
Export Citation:
Assignee:
TOSOH CORP (JP)
MESUDA MASAMI (JP)
KURAMOCHI HIDETO (JP)
IIGUSA HITOSHI (JP)
OMI KENJI (JP)
SHIBUTAMI TETSUO (JP)
MESUDA MASAMI (JP)
KURAMOCHI HIDETO (JP)
IIGUSA HITOSHI (JP)
OMI KENJI (JP)
SHIBUTAMI TETSUO (JP)
International Classes:
C04B35/453; C23C14/08; C23C14/34; H01L21/363
Domestic Patent References:
| WO2007066490A1 | 2007-06-14 | |||
| WO2007000878A1 | 2007-01-04 | |||
| WO2009110092A1 | 2009-09-11 |
Foreign References:
| JP2010202896A | 2010-09-16 | |||
| JP2002246621A | 2002-08-30 | |||
| JP2010150610A | 2010-07-08 | |||
| JPH07288049A | 1995-10-31 | |||
| JPH02149459A | 1990-06-08 | |||
| JP2009167095A | 2009-07-30 | |||
| JPS58500174A | 1983-02-03 | |||
| JP2008115453A | 2008-05-22 |
Other References:
See also references of EP 2650271A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
Download PDF:
Claims:
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