Title:
ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 CONTAINING FILMS USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2018/122603
Kind Code:
A3
Abstract:
Group 4 transition metal-containing film forming compositions are disclosed comprising Group 4 transition metal precursors having the formula: L2-M-C4AR3-3-[(ER2)m-(ER2)n-L']-, L2-M-(C3(m-A2)R2-4-[(ER2)m- (ER2)n-L']-, L2-M-(C5AR4-4-[(ER2)m-(ER2)n-L'], and L2-M-(C4(m- A2)R3-4-[(ER2)m-(ER2)n-L']-, wherein M is Ti, Zr, or Hf; each A is independently N, Si, B or P; each E is independently C, Si, B or P; m and n is independently 0, 1 or 2; m + n >1; each R is independently a H or a C1-C4 hydrocarbon group; each L is independently a -1 anionic ligand selected from the group consisting of NR'2, OR', Cp, amidinate, β- diketonate, or keto-iminate, wherein R' is a H or a C1-C4 hydrocarbon group; and L' is NR" or O, wherein R' is a H or a C1-C4 hydrocarbon group. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Group 4 transition metal-containing films on one or more substrates via vapor deposition processes.
Inventors:
GATINEAU SATOKO (KR)
NOH WONTAE (KR)
KIM DAEHYEON (KR)
GATINEAU JULIE (KR)
GIRARD JEAN-MARC (FR)
NOH WONTAE (KR)
KIM DAEHYEON (KR)
GATINEAU JULIE (KR)
GIRARD JEAN-MARC (FR)
Application Number:
PCT/IB2017/001658
Publication Date:
January 10, 2019
Filing Date:
December 14, 2017
Export Citation:
Assignee:
AIR LIQUIDE (FR)
GATINEAU SATOKO (KR)
NOH WONTAE (KR)
KIM DAEHYEON (KR)
GATINEAU JULIE (KR)
GIRARD JEAN MARC (FR)
GATINEAU SATOKO (KR)
NOH WONTAE (KR)
KIM DAEHYEON (KR)
GATINEAU JULIE (KR)
GIRARD JEAN MARC (FR)
International Classes:
C23C16/455; C04B35/622; C07F17/00; C23C16/06; C23C16/50
Foreign References:
| US20130337659A1 | 2013-12-19 | |||
| US20150255276A1 | 2015-09-10 | |||
| KR20140078534A | 2014-06-25 | |||
| US5621127A | 1997-04-15 | |||
| US20170107612A1 | 2017-04-20 |
Attorney, Agent or Firm:
DE BEAUFORT, François-Xavier (FR)
Download PDF: