ZOOM OPTICAL SYSTEM, ALIGNER HAVING THE ZOOM OPTICAL SYSTEM, AND ALIGNING METHOD

WIPO Patent Application WO/2002/057830

A1

A zoom optical system capable of ensuring a required magnification without substantially changing positions of an object plane and an image plane and positions of an entrance pupil and an exit pupil when a focal length is changed. When the focal length is changed between a maximum focal length state and a minimum focal length state, at least two lens groups are moved along a predetermined track, and the predetermined track is specified so as not to substantially change the positions of the object plane and the image plane and positions of the entrance pupil and the exit pupil. When the focal length is changed to the minimum focal length state, the lens group (G2) having a negative refractive power is moved toward the object. When the focal length is changed to the maximum focal length state, the lens group (G2) having a negative refractive power is moved toward the image.

JP2004070044	PROJECTION TOY
JP6971654	Optical system and an image pickup device having it
JPS6040604	[Title of the Invention] Gauss type large caliber ratio photographic lens

HIRAGA KOUICHI (JP)
SUENAGA YUTAKA (JP)

PCT/JP2002/000065

July 25, 2002

January 10, 2002

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NIPPON KOGAKU KK (JP)
HIRAGA KOUICHI (JP)
SUENAGA YUTAKA (JP)

G02B13/18; G02B15/16; G02B15/167; G02B15/173; G02B19/00; G02B15/20; G03F7/20; G03F7/207; H01L21/027; (IPC1-7): G02B15/20; G02B19/00; H01L21/027; G03F7/20

JP2000284176A	2000-10-13
US5771119A	1998-06-23
JPH11125770A	1999-05-11

Inoue, Yoshio (1-4 Nihonbashi 3-chom, Chuo-ku Tokyo, JP)

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