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WO/2016/017510A1 |
A substrate processing device (10) is provided with a sputtering device (70). The sputtering device is provided with: a sputtering chamber; two targets (72) for sputtering a thin film on two film-forming surfaces (15a, 15b) of the substr...
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WO/2016/013401A1 |
Provided is a technique for improving the film quality of a thin film deposited on a substrate. Drive units driving a substrate transport mechanism which transports a plurality of substrates side-by-side in a row along a transport pathwa...
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WO/2016/013565A1 |
This control device controls a flow rate of a liquid to be supplied to a holding device, which generates, by discharging the liquid, negative pressure between the holding device and a subject to be held, and which holds the subject. The ...
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WO/2016/011114A1 |
A method for cutting a flexible glass substrate is provided. The method includes directing the flexible glass substrate to a flexible glass cutting apparatus including a laser. The flexible glass substrate includes a first broad surface ...
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WO/2016/010106A1 |
[Problem] To provide a technology with which a film or glass can be bonded to and easily detached from a transporting substrate when manufacturing a substrate. [Solution] A method for manufacturing a substrate on a surface of which elect...
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WO/2016/004655A1 |
A glass substrate (12) pick up and place device, comprising: a carrier support (110) for bearing the glass substrate (12), a first stop block (111) fixedly disposed on the bearing support (110), and a second stop block (112) movably disp...
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WO/2015/197948A1 |
The invention concerns a method for activating a layer supported by a glass substrate comprising the heat treatment, in an enclosure, of a stack of a plurality of specimens of said glass substrate, said glass substrates being separated b...
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WO/2015/186855A1 |
The objective of the present invention is to provide a wire-driven linear transfer device provided with a tension-maintaining unit capable of stably and accurately transferring a movement member to a target position by using a wire. The ...
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WO/2015/178189A1 |
The purpose of the invention is to stabilize with high precision the floating distance on a virtual high-precision flotation line of an object to be conveyed. A flotation conveying device (1) comprises a conveyance rail (2) on which an o...
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WO/2015/177402A1 |
The present specification discloses a system for handling of components, a system of measuring, a method for component cleaning, a method for component coating, and a method for component drying.
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WO/2015/174256A1 |
The present invention provides a hand for an industrial robot for conveying a glass substrate such that the hand is capable of minimizing positional shifting of the glass substrate relative to the hand when conveying the glass substrate ...
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WO/2015/174524A1 |
In order to provide a glass substrate conveying device that conveys a glass substrate, this glass substrate conveying device includes: a first conveying means in which a plurality of first conveying units are aligned in the same horizont...
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WO/2015/174347A1 |
A laser annealing device (1) for performing annealing on objects to be processed (100) by radiating a laser beam (42) thereon, wherein the laser annealing device (1) is provided with a serial conveyance path (2) for serially conveying th...
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WO/2015/163163A1 |
This glass plate retainer (11) is provided with a retainer body (21) for retaining a glass plate (G) that is being subjected to glass plate processing, and a regulating member (61) for regulating the movement of the glass plate (G) retai...
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WO/2015/161349A1 |
A device for lifting and transporting sheet material includes a base portion; wheels on which the base portion is supported; a mast that extends upwardly from the base portion; a boom that extends from a first end outwardly from the mast...
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WO/2015/145948A1 |
A flat first suction surface (14a) and a flat second suction surface (14b) for sucking a semiconductor wafer are disposed on the upper surface side of a first arm (10a) and a second arm (10b), respectively. A connecting member (12) conne...
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WO/2015/145994A1 |
The present invention is provided with a plurality of servo-drive destackers (1) and a unit for controlling the destackers (1). A vacuum-chucking part of the destacker (1) is lowered to the upper surface of a stack, whereupon a thin-plat...
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WO/2015/137318A1 |
Provided is a non-contact type flotation transport apparatus with which, in simple apparatus configuration that utilizes the swirling force of swirling flows and obviates the need for a contact-type drive mechanism, transported articles ...
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WO/2015/137319A1 |
Provided is a non-contact floating transport device for utilizing the swirling force of swirl flows to smoothly transport an object while causing the transported object to float using a simple device configuration without adding a contac...
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WO/2015/129749A1 |
Provided is a non-contact levitation transport apparatus (100) for transporting an article while causing the article to levitate in a non-contacting state using a simple apparatus configuration that uses the swirling force of a swirling ...
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WO/2015/120962A1 |
A dip coating system comprises in a known manner at least one dip-coating tank (1), which can be filled with a treatment fluid. A conveying system (3, 10) displaces the articles to be treated to the dip-coating tank, into the interior of...
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WO/2015/117638A1 |
A system for depositing one or more layers, particularly layers including organic materials therein, is described. The system includes a load lock chamber for loading a substrate to be processed, a transfer chamber for transporting the s...
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WO/2015/113081A2 |
Disclosed is a device (1) for transporting plate-type objects such as insulating-glass blanks (20), for example from the discharge point (10) of a sealing station into a storage area formed by harp racks (30) and/or bearing blocks (40), ...
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WO/2015/114634A1 |
A levitation system is disclosed. The levitation system comprises at least one levitation device having a horizontal flexible tapered member physically coupled to a vibration actuator via a vertical flexible rod, wherein a widest surface...
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WO/2015/107062A1 |
The aerial conveyor (2) has a guide (4) along which there is slidingly engaged an inextensible chain (5) having hooks for hanging parts, and means for differentiating the speed taken on by the chain (5) in different sections of the guide...
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WO/2015/096855A1 |
A holding arrangement (10) for holding a substrate (20) during vacuum layer deposition is provided. The holding arrangement (10) includes a frame having one or more frame elements; and one or more contact interfaces (50, 500) provided at...
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WO/2015/057347A9 |
According to the disclosed embodiments, an illustrative system comprises a cartridge -receiving member configured to receive a product cartridge, and a product- receiving member configured to receive product from the product cartridge, t...
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WO/2015/097156A1 |
A transporting element for accommodating and for transporting spherical, cylindrical or egg-shaped articles, in particular foodstuffs, in particular eggs, along a conveying route, having a plurality of mounts arranged one beside the othe...
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WO/2015/098093A1 |
This end effector device (1) is provided with: a hand (3); a plurality of holding sections (4A, 4B) that are provided to the hand (3) and that hold a plurality of semiconductor wafers (9) in a manner such that the plurality of semiconduc...
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WO/2015/093803A1 |
The present invention relates to a jig for loading plate glass of a tempered glass manufacturing apparatus. The present invention includes, inside of a jig (100) for holding plate glass (110), a width control means (120) and a height con...
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WO/2015/092685A1 |
A plant for the dip-treatment of bodies comprises at least one skid (11) intended to support a body to be treated; at least one process liquid tank (13); a skid transportation line (14); a system (20, 21) for overturning and immersing th...
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WO/2015/085606A1 |
An automatic material-transporting device and overhead travelling crane system thereof; the overhead travelling crane system comprises an overhead travelling crane track and a trolley moving on the overhead travelling crane track; the tr...
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WO/2015/087177A1 |
A tile sorting and stacking system (1), comprising: a sorting carousel (4) comprising carousel arms (6) with gripping means (18); seatings (7) for receiving the tiles; an input line (2) and an output line (9) arranged radially or tangent...
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WO/2015/083609A1 |
A conveyance device (10) that conveys plate-shaped members, said conveyance device (10) comprising a plurality of liquid discharge devices which hold the member by generating negative pressure between themselves and the member as a resul...
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WO/2015/083615A1 |
A swirl flow formation body (1) that holds plate-shaped members by generating negative pressure between itself and the member as a result of discharging a fluid, said swirl flow formation body (1) comprising: a columnar body (11); a flat...
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WO/2015/083613A1 |
A holding device that holds plate-shaped members by generating negative pressure between itself and the member as a result of discharging a fluid, said holding device comprising: a columnar body; a flat end surface which is formed on the...
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WO/2015/079746A1 |
A flat supporting glass plate (Gb) contacts the lower end portion (X) of the bottom face of a product glass plate (Ga) by being raised while the product glass plate (Ga) is stationary and flexed downward in a convex shape by having two o...
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WO/2015/076141A1 |
Provided is a low cost floating transport device configured in such a manner that: the collision of rolling bodies with an object being transported and a transport surface is prevented; and the drive force of the rolling bodies can be ef...
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WO/2015/072065A1 |
Provided are a substrate floating apparatus, a substrate transfer apparatus, and a substrate transport apparatus, whereby energy and space are saved, maintenance is eliminated, cost is reduced, and air current controllability is improved...
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WO/2015/064374A1 |
Provided are a conveyance device and a plate material support with which plate materials can easily be positioned and damage to plate materials can be minimised, and which have a simple configuration. If a plate material (2) is deforming...
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WO/2015/059861A1 |
A communication device (10) is provided with: a parallel interface (11) that communicates with a placing port (20); a network communication unit (14) that communicates with the transport carriage (30) via a network; and a control unit (1...
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WO/2015/057346A1 |
According to the disclosed embodiments, an illustrative product cartridge comprises first and second opposing walls separated by a distance defined by a product to be transported by the cartridge, the first and second walls configured to...
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WO/2015/056368A1 |
A transfer device, and the like, of the disclosure of the present invention comprises the following: a magnet (21) one end of which is connected to a cord-shaped member (22) and which is hung at a specific height; and a substrate receivi...
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WO/2015/052763A1 |
This substrate transfer device (100) is provided with: a conveyor part (1) for transporting a substrate (CB) along a transportation direction and a first guide rail (2) and a second guide rail (3) provided so that a space is present ther...
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WO/2015/042304A1 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carri...
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WO/2015/042302A1 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carri...
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WO/2015/042309A1 |
A substrate carrier adapted to use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic chucking force for securing a substrate to the substrate carri...
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WO/2015/040915A1 |
This transport-in/transport-out apparatus (100) is provided with a carrier stage (2) having protruding parts (3, 4) used to position a transported object (1), and a transfer robot (50) for transporting the transported object (1) into and...
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WO/2015/037701A1 |
Provided is an industrial robot that enables a hand to be properly operated when conveying a high-temperature object to be conveyed in a vacuum even when the arm comprises multiple arm sections that are connected together in a rotatable ...
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WO/2015/037702A1 |
Provided is an industrial robot that has a reduction gear assembly at each joint section and that can be overhauled easily and at a low cost. This industrial robot is equipped with: a distal arm section (21) to which a hand (4) is rotata...
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