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WO/2013/052953A1 |
Methods, structures, devices and systems are disclosed for implementing optomechanical sensors in various configurations by using two optically coupled optical resonators or cavities that can be move or deform relative to each other. The...
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WO/2012/149256A2 |
Techniques are provided for reducing mount vibration in an inertial rate sensor (IRS). For example, if oscillation in an IRS's vibratory members, vibrating along a first axis, cause displacement in the IRS's mount along a second axis, th...
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WO/2011/121863A1 |
Disclosed is a piezoelectric thin-film element which comprises a substrate and, disposed thereon, at least a lower electrode, a piezoelectric thin film represented by the general formula (NaxKyLiz)NbO3 (0≤x≤1, 0≤y≤1, 0≤z≤0.2,...
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WO/2011/111732A1 |
Disclosed is a manufacturing method for a sensor element equipped with a PZT film, that forms a good quality, and substantially homogenous PZT film. The method forms a lower electrode E0 on a surface of one side of an SOI substrate 31 ha...
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WO/2011/085501A1 |
A head mounted information system comprises a frame configured to be worn by a user, a sensor unit coupled to the frame, and a processor unit coupled to the frame. The processor unit is connected to receive signals from the sensor unit. ...
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WO/2011/056908A2 |
A disclosed gyroscope or accelerometer apparatus is integrated into an integrated circuit chip. The apparatus has phase locked loops (PLLs) (210, 212) formed on a substrate that generate a signal having a wavelength that is less than 10m...
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WO/2011/021068A1 |
An apparatus and method comprising of a remote microphone attached to a portable radio such as those carried by Firefighters and other First Responders and equipped with automatic motion sensing and Emergency Alert capabilities which bec...
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WO/2010/093557A2 |
A technique includes receiving data indicative of a first measurement acquired by a rotation sensor on a seismic streamer and based on the first measurement, estimating a torque noise present in a measurement acquired by a second sensor ...
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WO/2010/064562A1 |
Provided is a low-cost angular velocity detection device which can reduce the effect of coupling between a drive electrode and a first displacement detection electrode caused by a floating capacity. An oscillating body (21) can be displ...
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WO/2009/087858A1 |
The surface of a substrate (2) is equipped with drive mass portions (4 to 7) at positions of point symmetry with respect to a center point (O). The drive mass portions (4 to 7) connect a connecting beam (8) mutually thereto. The connecti...
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WO/2009/061747A1 |
A sensor that measures angular velocity about an axis that is normal to a sensing plane of the sensor. The sensor comprises a sensing subassembly that includes a planar frame parallel to the sensing plane, a first proof mass disposed in ...
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WO/2009/050813A1 |
Provided is an electrostatic capacity detection device which outputs an electric signal in accordance with an electrostatic capacity accompanying an object to be measured. The device includes: a measurement terminal to be arranged in con...
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WO/2009/035369A1 |
The invention relates to instrument engineering and can be used in orientation and navigation systems for measuring the velocity of the uniform and rectilinear motion of an object, for example an aircraft or a submarine etc, in relation ...
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WO/2009/028594A1 |
An angular velocity signal detection circuit includes: a first current/voltage conversion circuit (11) which converts current outputted from a first detection electrode (21) of a gyro sensor (2) into voltage and amplifies it so as to out...
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WO/2008/149821A1 |
Provided is a small and low-height sensor device. The sensor device is provided with a base body (1); a mounting body (3), which is arranged by being at least partially spaced apart from the base body (1) and can be displaced with respec...
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WO/2008/126409A1 |
An acceleration sensor is provided with a main substrate having a spindle section, and a facing substrate, which is placed over the main substrate through a protruding section and faces the spindle section of the main substrate through a...
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WO/2008/079930A1 |
Operation of a planar resonator gyroscope with in-plane parasitic modes of vibration to obtain improved performance is disclosed. A planar resonator gyroscope, such as a disc resonator gyroscope, may be operated with embedded electrodes....
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WO/2008/021534A1 |
A dual-axis tuning fork gyroscope includes four open-ended tuning forks arranged coplanarly in two opposite pairs, a first pair of open-ended tuning forks being arranged opposite one another along a first axis, a second pair of open-ende...
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WO/2008/010337A1 |
A tuning fork-shaped vibrator small-sized, having a reduced height, and capable of being used as a vibration gyro having excellent detection sensitivity, and a vibration gyro using the tuning fork-shaped vibrator. The tuning fork-shaped ...
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WO/2007/120158A1 |
A cup or bell shaped angular rate sensor electrode has drive or sense electrodes repositioned from their typical location at the nodes. One pair of electrodes, residing on opposite sides of the cup, is uniformly displaced in one directio...
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WO2006132773B1 |
Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perp...
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WO/2007/086849A1 |
A method of operating an anti-phase six degree-of-freedom tuning fork gyroscope system comprises the steps of driving a first three degree-of-freedom gyroscope subsystem, and driving a second three degree-of freedom gyroscope subsystem i...
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WO/2006/057128A1 |
A piezoelectric vibrator (10) has a first piezoelectric body substrate (1a) and a second piezoelectric body substrate (1c). The first piezoelectric body substrate (1a) has a first main surface (41) and a second main surface (42) that are...
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WO/2006/026151A2 |
A gimbal-type torsional z-axis micromachined gyroscope with a nonresonant actuation scheme measures angular rate of an object with respect to the axis normal to the substrate plane (the z-axis). A 2 degrees-of-freedom (2-DOF) drive-mod...
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WO/2006/009194A1 |
There is provided a semiconductor sensor in which a diaphragm can be prevented from being damaged through movement of a weight even if the weight collides onto a semiconductor integrated circuit substrate, and the diaphragm section can b...
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WO/2006/009578A2 |
A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope (10) and fabrication methods. The gyroscope (10) is formed using substrate material having lower and upper layers (21,23) sandwiching a sacr...
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WO/2005/104228A1 |
A sensor system includes a sensor device (10) and an integrated circuit (20) for driving the device (10). The device (10) includes a sensor body (1) of a silicon-based material, an upper sealing member (2) of a silicon-based material, an...
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WO/2005/083356A1 |
An apparatus and a system, as well as a method and an article, may include coupling a plurality of masses to provide a plurality of output signals responsive to motion relative to a common axis. Moving the plurality of masses at a substa...
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WO/2005/076017A1 |
Micromachined vibratory gyroscope and method in which the vibrating masses are coupled electronically, e.g. by electronically adjusting the resonance frequency of one or more of the masses so that all of the masses have the same resonanc...
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WO2005017445B1 |
There is a sensor element (24) for an electronic sensor device (20). The sensor element (24) may have a substrate (43), a pair of proof masses (34a, 34b), a set of drive beams (44), and at least one base beam (46). The pair of proof mass...
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WO/2005/062754A2 |
A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position and velocity of the device without the ne...
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WO/2005/031257A2 |
An oscillatory rate sensor is described for sensing rotation about the 'z-axis'. It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue...
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WO/2004/097895A2 |
A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a stem (21). The appendage (15) comprises a...
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WO/2004/094951A1 |
A drive component that comprises a drive axis, a pendulous sensor component that comprises a center of mass, and a hinge component that comprises a rotation axis of an electromechanical system. The drive component makes a determination o...
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WO/2004/074168A2 |
A packaged microchip has an isolator (24) that minimizes stress transmission from its package (12) to its microchip (16). To that end, the packaged microchip includes a stress sensitive microchip having a bottom surface with a bottom sur...
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WO/2004/022477A1 |
A packaged microchip (10) has a stress sensitive microchip (16) having a microchip coefficient of thermal expansion, a package (12) having a package coefficient of thermal expansion, and an isolator (24) having an isolator coefficient of...
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WO/2004/015429A1 |
The present invention provides a solid-state acceleration sensor device formed by thin films for generating an electrical voltage output proportional to acceleration motion. The precision thin-film piezoelectric elements are configured a...
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WO/2003/065050A2 |
Devices fabricated on a wafer are encapsulated by forming a pattern of bond rings on a cap wafer and aligning and bonding the two wafers together, under thermo-compression, so that an operational part (22) of each device (20) is surround...
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WO/2003/065052A2 |
A method for manufacturing an accelerometer that includes the steps of etching at least one cavity into the top side of a substrate, bonding a top layer of material onto the top side of the substrate, depositing metallization onto the la...
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WO/2003/038449A1 |
The invention relates to a micro-sensor with a sensor element (2) and an integrated circuit (1), comprising a semiconductor body (11) with an integrated circuit (4), whereby the sensor element (2) is arranged on a main surface (12) of th...
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WO/2003/036305A2 |
An accelerometer (100) comprising a silicon wafer is etched to form a fixed portion (400), a movable portion (300), and a resilient coupling (120) between, the fixed and movable portions generally arranged in the plane of the wafer, the ...
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WO/2003/009680A1 |
An application of rate gyros and accelerometers allows electronic measurement of the motion of a rigid or semi-rigid body, such as a body associated with sporting equipment including a fly rod during casting, a baseball bat, a tennis rac...
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WO/2002/093122A2 |
The invention relates to a sensor arrangement (1), in particular a micro-mechanical sensor arrangement (1) and method for production thereof, comprising a sensor section (2), for delivering determined sensor signals and a cover section (...
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WO/2002/064497A1 |
A gyroscope which comprises: a driving fixed electrode (26) being fixed; a driving displacement electrode (24) being opposite to the driving fixed electrode, and being able to be displaced in a first direction; an inertial mass (23) bein...
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WO/2002/057799A2 |
An apparatus and method for suspending two or more force-versus-displacement sensors for measuring displacement of a pendular structure relative to a frame structure, wherein a suspension structure includes the frame and pendular structu...
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WO/2002/053424A1 |
The invention relates to a brake regulating system (1, 1'), whereby a control unit (12) specifies an adjusting value for the breaking pressure of each wheel and/or an adjustment value for an output variable of the drive motor on the outp...
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WO/2002/051741A2 |
The invention relates to a method for producing a semiconductor component (330; 400; 500; 600; 700; 800; 900; 1000; 1100) such as especially, a multiple layer semiconductor component, having a movable mass or an oscillator structure (501...
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WO/2002/043205A2 |
A net zero isolator having an elongated linear displacement member; and first and second counter rotation members arranged crosswise to the linear displacement member at either end thereof; each of the first and second counter rotation m...
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WO/2002/041006A2 |
Microaccelerometer which comprises a movable silicon proofmass, constututed by two silicon masses and supported by metal beam means, which is constituted by two metal beams. The two metal beams are defined in a metal plate. The proofmass...
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WO/2002/022494A2 |
This invention discloses a method for electronically decreasing the sensitivity of thin film movable micromachined layers to vibrations, accelerations, or rotations that would result in part or all of the movable layer being displaced in...
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