| Document |
Document Title |
|
WO/2010/006687A1 |
An illumination system of a microlithographic projection exposure apparatus (10) comprises an optical raster element (72) configured to produce a plurality of secondary light sources (95) located in a system pupil surface (70). The optic...
|
|
WO/2010/007945A1 |
Provided is an illuminating optical system (ILS) wherein a luminous flux outputted from a light source is inputted to a first fly-eye optical system (22), and luminous fluxes outputted from a plurality of mirror elements (22a) configurin...
|
|
WO/2010/001015A1 |
The invention relates to a radiation collector (10) designed to concentrate part of the radiation produced by a source on a spot (100). The collector includes a primary concave mirror (1) and a secondary convex mirror (2), each being rot...
|
|
WO/2009/125511A1 |
An illumination optical system for illuminating a surface to be irradiated with light from a light source. The illumination optical system comprises a distribution forming optical system for forming a predetermined light intensity distri...
|
|
WO/2009/115086A1 |
The invention relates to a method and lens arrangement for light focusing. The method and lens arrangement (1) according to the invention enable the merging of light beams (3, 4) coming from different directions into one focal point (7),...
|
|
WO/2009/101771A1 |
The illumination optical system includes an integrator configured to divide light from a light source into plural light fluxes, and a collection optical system configured to collect the plural light fluxes from the integrator toward an i...
|
|
WO/2009/101958A1 |
An illumination optical system for illuminating planes-to-be-illuminated (M; W) by light from a light source (1) includes: distribution forming optical systems (3, 4, 7, 8) having an optical integrator (8) and forming a pupil intensity d...
|
|
WO/2009/093530A1 |
A microscope system comprises a transmission illumination optical system having a light source (11) and a condenser lens (13), a first dry objective lens (15a) having a magnification of 20 or above but not above 40 required for any one o...
|
|
WO/2009/091827A2 |
Various embodiments disclosed herein provide for an asymmetric compound parabolic concentrator (ACPC), a liquid light guide, and an algae mixer. These embodiments may be used singularly or in combination, for example, as part of a biorea...
|
|
WO/2009/078223A1 |
An illumination optical system enabling a desired pupil intensity distribution, for example, by curbing the influence of diffracted light generated from around numerous regularly arranged micro-mirror elements. An illumination optical sy...
|
|
WO/2009/078224A1 |
An illumination optical system realizing a desired pupil intensity distribution while reducing influence of diffraction blur appearing in the diffraction image formed in an illumination pupil by, for example, reflected light from micro m...
|
|
WO/2009/060744A1 |
Provided is an illumination optical device which can maintain a high use efficiency of a pulse-emitted illumination light and reduce the affect of luminance irregularities caused by the spatial coherency of the illumination light without...
|
|
WO/2009/051029A1 |
A projector apparatus comprises a polarized light beam splitter block (223) having a shape of a rectangular parallelepiped and having two edge surfaces perpendicular to a polarized light splitting surface (223a) and four side surfaces pe...
|
|
WO/2009/050966A1 |
An illumination optical system of which a reflection characteristic of a reflecting member such as a reflection mirror and a total reflection forty-five degree prism can be stably maintained. The illumination optical system of the presen...
|
|
WO/2009/034211A2 |
The invention relates to a device for enabling the optical concentration of light beams falling on part of the device, called "illumination or capturing surface or area (AI)" in another part of the device, called "concentration surface o...
|
|
WO/2009/030121A1 |
A LED lamp uses a high-power LED (3) encapsulating a single chip or integrally encapsulating multi chips as an illuminant, and a free-curved surface lens (2) is disposed in the light irradiating direction of the LED. When a satisfatory d...
|
|
WO/2009/016604A1 |
A light system with at least three light emitting elements and at least one collimating means comprised of a base part, an output area, and sidewalls, which extends between said base part and said output area. The base part and the sidew...
|
|
WO/2008/132247A2 |
The invention relates to a liquid receptacle (22) comprising a bottom (1) and sidewalls for holding a liquid. The bottom (1) encompasses a flat sensor surface (3) that is in contact with the liquid when the receptacle is filled, a light-...
|
|
WO/2008/078820A1 |
An integrator (21) collects and guides light inputted from alight source (11) by a light guiding body having a light entering surface (21a) and a light outgoing surface (21b), and outputs the light as a surface light source having unifor...
|
|
WO/2008/073105A1 |
An illumination unit provides light for a projection display system. The illumination unit includes a light guide defined by an entry angle. A light source 200 provides emitted light according to a characteristic radiation pattern. A len...
|
|
WO/2008/017718A1 |
A first toroidal ray guide defines an axis of revolution and has a toroidal entrance pupil adapted to image light incident on the entrance pupil at an angle to the axis of revolution between 40 and 140 degrees, and it also has a first im...
|
|
WO/2007/111146A1 |
A lighting optical system capable of keeping a desired profile even if the outline shape of a light intensity distribution formed on a lighting pupil surface is varied using an axicon system. The lighting optical system, illuminating a s...
|
|
WO/2007/055120A1 |
A lighting optical system which illuminates a surface to be illuminated with light in a desired polarizing state by regulating a polarization distribution on an illumination pupil surface or a surface to be illuminated. A lighting optica...
|
|
WO/2006/114294A2 |
An illumination system (12) of a microlithographic exposure apparatus (10) comprises a condenser (601; 602; 603; 604; 605; 606) for transforming a pupil plane (54) into a field plane (62) . The condenser has a lens group (L14, L15, L16, ...
|
|
WO/2006/100857A1 |
There is provided an illumination system for irradiating a distortion-free irradiation image onto an irradiation plane with a simple arrangement. A light blocking mask (24) for shielding light incident to each lens section (23b) from an ...
|
|
WO/2006/071391A1 |
An illumination system, such as may be used to illuminate an image display device in an image projection system, includes a plurality of light sources capable of emitting output light. In some embodiments, the light sources are light emi...
|
|
WO/2006/070580A1 |
An optical integrator having characteristics suppressing the influence of the relative positioning error of a pair of optical members on the illuminance distribution and the profile of the illuminated field. The wavefront splitting optic...
|
|
WO2006051536B1 |
Apparatus for concentrating light rays arriving from at least one opening onto a receiver, individual beams of the light rays each arriving at the apparatus substantially collimated, the apparatus including a respective Fresnel lens asse...
|
|
WO/2006/062764A2 |
A video projection system can utilize an advanced xenon short arc lamp to obtain a bright, high-resolution color image using a sufficiently cost-effective, compact and lightweight design. An unwanted radiation component of a white light ...
|
|
WO/2006/059549A1 |
There is provided an illumination optical device capable of illuminating a surface to be irradiated, with light of a desired polarization state while preferably suppressing a change of the polarization state of the light in the illuminat...
|
|
WO2005059645A9 |
A microlithography projection objective is proposed with optical elements, i.e. lenses or planar-parallel plates (used as end-closure plates) of crystalline magnesium fluoride, quartz, lanthanum fluoride, sapphire and Alpha-aluminium oxi...
|
|
WO/2006/054544A1 |
A lighting apparatus illuminates a plane (M) to be illuminated, with illuminating light projected from a light source (5). The lighting apparatus is provided with an entrance side reflection type fly’s eye optical system (12) configure...
|
|
WO/2006/041619A2 |
An optically pumped semiconductor laser (20) in accordance with the present invention includes a II-VI semiconductor laser chip (22). A plurality of InGaN LEDs (50) provides optical pump light for optically pumping the laser chip (22). A...
|
|
WO/2006/018972A1 |
A lighting optical device capable of almost uniformly regulating a pupil brightness distribution at every spot on a surface to be lighted while almost uniformly maintaining or regulating a lighting distribution on the surface to be light...
|
|
WO/2006/005922A1 |
The invention provides an optical transmission/collection device comprising a composite optical element (30; 60) having a first light transmission aperture (32; 56, 64) and a second light transmission aperture (34; 58, 66) and an optical...
|
|
WO/2005/104185A1 |
An illumination system has a light source that is at least partially enclosed within a light-recycling envelope. The light source is a light-emitting diode that emits light, and a fraction of that light will exit the light-recycling enve...
|
|
WO/2005/059618A2 |
Very high aperture microlithography projection objectives operating at the wavelengths of 248 nm, 193 nm and also 157 nm, suitable for optical immersion or near-field operation with aperture values that can exceed 1.4 are made feasible w...
|
|
WO/2005/050718A1 |
A lighting optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) f...
|
|
WO/2005/041277A1 |
A lighting optical device and a projection aligner capable of reducing a light quantity loss when a mask is illuminated with a polarized lighting light. A lighting optical system (ILS) for illuminating a reticle (R) with a lighting light...
|
|
WO/2005/036619A1 |
An illumination optical device that realizes, when mounted for example on an exposure device, an illumination condition suitable for a mask pattern where two kinds of patterns having different characteristics are mixed. The illumination ...
|
|
WO/2004/104689A1 |
[PROBLEMS] To provide a light source device whose exit beam illuminance will never decrease. [MEANS FOR SOLVING PROBLEMS] A light source lamp unit (10) comprises a light source lamp (11) having a light emitter (111) where discharge emiss...
|
|
WO/2004/097499A1 |
The invention relates to an imaging system in which a diffractive optical element is used by both the illumination beam path and the imaging beam path. Said diffractive element operates in the reflection mode or transmission mode accordi...
|
|
WO/2004/055589A1 |
An image display apparatus comprising reflex spatial light modulators of non-light-emissive type; an illuminating apparatus for illuminating the reflex spatial light modulators; and a projection lens. A light from a light source (2) illu...
|
|
WO/2004/049410A1 |
An exposure apparatus, wherein the pattern of a mask (M) is transferred onto a photosensitive substrate (P) by guiding a light flux emitted from a light source (1) to the mask, comprises an illumination optical system which is disposed i...
|
|
WO/2004/049409A1 |
A method of producing an exposure system which illuminates a mask by using an illuminating optical system including a condensing optical system to transfer the mask’s pattern onto a photosensitive substrate, the method comprising the s...
|
|
WO/2004/043076A2 |
An illumination arrangement (1) for a projection system is proposed comprising a light source device (10) and a light collecting, integrating and redirecting device (20). The light source device (10) comprises at least one solid state li...
|
|
WO2003100315B1 |
An illuminating device comprising a plurality of luminous elements (L1-Ln) serving as light sources, luminous element drive units (71-7n) so constructed as to respectively light and drive the plurality of luminous elements, an optical me...
|
|
WO/2004/034141A1 |
An illuminator exhibiting a high light utilization efficiency in an illumination system employing a plurality of light sources. The illuminator comprises a plurality of lamps (1, 1’), a prism (4), a first lens array (10) and a second l...
|
|
WO/2004/023570A1 |
Apparatus for collecting light from an LED and transmitting it in a nearuniform column includes a conical reflector about the base of the LED for collecting light emitted to the sides of the LED, and a lens specially designed to focus ...
|
|
WO/2004/021068A1 |
A condenser comprising a plurality of light sources (10, 20), and a light synthesizing element (30). These light sources (10, 20) comprise semiconductor laser array stacks (12, 22), collimator lenses (16, 26), and beam converters (18, 28...
|
