Title:
三フッ化窒素の精製方法
Document Type and Number:
Japanese Patent JP2009506977
Kind Code:
A
Abstract:
A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization.
Inventors:
Lee Young Kyun
Application Number:
JP2008529913A
Publication Date:
February 19, 2009
Filing Date:
August 31, 2006
Export Citation:
Assignee:
SODIFF ADVANCED MATERIALS CO., LTD.
International Classes:
C01B21/083
Attorney, Agent or Firm:
Mitsuo Tanaka
Takuji Yamada
Muneo Yamamoto
Yuko Goto
Takuji Yamada
Muneo Yamamoto
Yuko Goto