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Patent Searching and Data


Title:
バッチ式熱処理装置及び該装置に適用されるヒータ
Document Type and Number:
Japanese Patent JP2011528501
Kind Code:
A
Inventors:
ホ、クワンサン
カン、ホヨン
Application Number:
JP2011518650A
Publication Date:
November 17, 2011
Filing Date:
July 16, 2009
Export Citation:
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Assignee:
TERASEMICON CORPORATION
International Classes:
H01L21/324; F27B17/00; F27D7/02; F27D9/00; F27D11/02; H01L31/04; H05B3/10; H05B3/42; C22C38/00; C22C38/30
Domestic Patent References:
JP2004179672A2004-06-24
JP2002175868A2002-06-21
JP2006286222A2006-10-19
JP2000012471A2000-01-14
JP2002221394A2002-08-09
JP2003194478A2003-07-09
JP2006112762A2006-04-27
JP2003123651A2003-04-25
Foreign References:
WO2006022232A12006-03-02
Attorney, Agent or Firm:
大島 陽一