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Title:
中間電極層および圧電材料層が交互に配置された積層体を有するアクチュエータの製造工程
Document Type and Number:
Japanese Patent JP2013530518
Kind Code:
A
Inventors:
マレク, ナディム
ルヴァン, ローラン
Application Number:
JP2013508545A
Publication Date:
July 25, 2013
Filing Date:
May 05, 2011
Export Citation:
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Assignee:
ルノー エス.ア.エス.
International Classes:
H01L41/22; F02M51/00; F02M51/06; H01L41/083; H01L41/187; H01L41/277; H01L41/293
Domestic Patent References:
JPH07221360A1995-08-18
JP2006108638A2006-04-20
JPH04237172A1992-08-25
JP2003243738A2003-08-29
JPH05267738A1993-10-15
JPH06188473A1994-07-08
JP2001244514A2001-09-07
JPH07221360A1995-08-18
JP2006108638A2006-04-20
JPH04237172A1992-08-25
JP2003243738A2003-08-29
JPH05267738A1993-10-15
Attorney, Agent or Firm:
園田 吉隆
小林 義教