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Title:
INSPECTION DEVICE, INSPECTION METHOD AND COMPUTER PROGRAM
Document Type and Number:
Japanese Patent JP2018190282
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an inspection method which is robust to variation elements such as noise, etc.SOLUTION: Target data representing a state of an inspection object and a plurality of processing parameters different from one another are input (S301), and respective feature measurement processes using a plurality of the processing parameters are performed for the target data (S302). Further, results of respective feature measurement processes are integrated, and a physical amount enabling comparison with a predetermined inspection standard is extracted from the integrated result as a first feature of the target data (S303). Further, a feature of the target data not depending on the inspection standard is extracted as a second feature (S304). Information for determining the quality of the inspection object is generated based on the extracted first feature and the second feature (S305).SELECTED DRAWING: Figure 12

Inventors:
IWAMOTO TAKAYUKI
FUJIMORI TOMOKI
MITARAI HIROSUKE
Application Number:
JP2017094070A
Publication Date:
November 29, 2018
Filing Date:
May 10, 2017
Export Citation:
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Assignee:
CANON KK
International Classes:
G06T7/00; G01N21/88
Attorney, Agent or Firm:
Masatake Suzuki