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Title:
DETECTOR, LITHOGRAPHY DEVICE AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2019203991
Kind Code:
A
Abstract:
To provide an advantageous technology for measuring a position of a side surface of a substrate at high accuracy.SOLUTION: A detector for detecting a position of a side surface of a substrate has a sensor including a light irradiation part and a light detection part, and a processor for treating a signal output from the sensor, in which the light irradiation part irradiates a light to the side surface of the substrate, the light detection part detects a light from the side surface, the processor determines the position of the side surface of the substrate based on a first signal output from the light detection part in a state where the substrate exists, and a second signal output from the light detection part in a state where no substrate exists.SELECTED DRAWING: Figure 8

Inventors:
MATSUDA KOICHIRO
Application Number:
JP2018099019A
Publication Date:
November 28, 2019
Filing Date:
May 23, 2018
Export Citation:
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Assignee:
CANON KK
International Classes:
G03F7/20; B29C59/02; G01B11/00; H01L21/027; H01L21/68
Domestic Patent References:
JP2017116868A2017-06-29
JPH06266841A1994-09-22
JP2003021781A2003-01-24
JP2011185664A2011-09-22
JP2008210951A2008-09-11
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu



 
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