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Title:
【発明の名称】超伝導材料構造
Document Type and Number:
Japanese Patent JP2582380
Kind Code:
B2
Abstract:
PURPOSE:To enable a superconductive material layer to be protected from air and water contents, to enable characteristics to be stabilized, and to realize a fine patterning by coating a ceramics series superconductive material layer with a ceramics series material layer consisting of the same type of element as this superconductive layer and with different element ratio. CONSTITUTION:Firstly, a superconductive material layer 2 of ceramics family with a composition of YBa2Cu3O7-x is formed on a substrate 1 under a temperature of 300 to 1000 by the EB deposition method or CVD method and then it is subject to oxygen thermal treatment under a temperature of 400-1000 deg.C within the same chamber. It allows introduction of oxygen to be adjusted properly, thus resulting in a high- temperature superconductor. After that, a protective layer 3 with a composition of Y>1Ba<2Cu<3O<6.8 is formed on the superconductive material layer 2 under a temperature of 300-1000 deg.C within the same chamber by the sputter method, EB deposition method, or CVD method. Thus, since the ceramics series superconductive material layer 2 is coated with a protective layer 3 of ceramics series material which consists of the same type of element as this layer 2, being thermally stable and is superb in water resistance, having different element ratio, the superconductive characteristics is made stable and the reliability is superb.

Inventors:
YAMAWAKI HIDEKI
KIMURA TAKAAKI
IKEDA KAZUTO
IHARA MASARU
Application Number:
JP26411687A
Publication Date:
February 19, 1997
Filing Date:
October 20, 1987
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01B12/06; H01L21/768; H01L23/522; H01L39/24; (IPC1-7): H01L39/24; H01B12/06; H01L21/768
Domestic Patent References:
JP167984A
Attorney, Agent or Firm:
Ariga Gunichiro