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Patent Searching and Data


Title:
【発明の名称】プラズマ反応方法およびプラズマ反応装置
Document Type and Number:
Japanese Patent JP2639569
Kind Code:
B2
Inventors:
YAMAZAKI SHUNPEI
Application Number:
JP23316888A
Publication Date:
August 13, 1997
Filing Date:
September 16, 1988
Export Citation:
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Assignee:
HANDOTAI ENERUGII KENKYUSHO KK
International Classes:
C23C16/50; C23C16/26; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): C23C16/50; C23C16/26; C23F4/00; H01L21/205; H01L21/3065
Domestic Patent References:
JP52127168A