Title:
【発明の名称】シリコン結晶の評価方法
Document Type and Number:
Japanese Patent JP2689565
Kind Code:
B2
Inventors:
Chihoko Kaneda
Kaneda Hiroshi
Kaneda Hiroshi
Application Number:
JP1668789A
Publication Date:
December 10, 1997
Filing Date:
January 25, 1989
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01N21/3563; G01N21/35; H01L21/66; (IPC1-7): G01N21/35; H01L21/66
Domestic Patent References:
| JP63135843A |
Attorney, Agent or Firm:
Teiichi