Title:
【発明の名称】SOI構造の形成方法
Document Type and Number:
Japanese Patent JP2698147
Kind Code:
B2
Inventors:
Shuji Nagasawa
Application Number:
JP3200789A
Publication Date:
January 19, 1998
Filing Date:
February 10, 1989
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
H01L21/20; H01L21/02; H01L21/265; H01L21/322; H01L21/84; H01L27/12; (IPC1-7): H01L21/20; H01L21/265; H01L21/322; H01L27/12
Domestic Patent References:
| JP62239520A | ||||
| JP6158879A | ||||
| JP5945996A |
Attorney, Agent or Firm:
Koji Yasutomi (1 person outside)