Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
【発明の名称】寸法検査方法
Document Type and Number:
Japanese Patent JP2825875
Kind Code:
B2
Inventors:
AKUTAGAWA SATORU
Application Number:
JP26152989A
Publication Date:
November 18, 1998
Filing Date:
October 06, 1989
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJITSU KK
International Classes:
H01L21/66; G01B11/24; (IPC1-7): H01L21/66; G01B11/24
Attorney, Agent or Firm:
Fumihiro Hasegawa (1 person outside)