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Patent Searching and Data


Title:
【発明の名称】エアギャップアイソレーション配線構造
Document Type and Number:
Japanese Patent JP2861107
Kind Code:
B2
Inventors:
MIZUTA TAKAYUKI
Application Number:
JP24417489A
Publication Date:
February 24, 1999
Filing Date:
September 19, 1989
Export Citation:
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Assignee:
NIPPON DENKI KK
International Classes:
H01L23/522; H01L21/768; (IPC1-7): H01L21/768
Domestic Patent References:
JP57190335A
JP6260241A
JP1170031A
JP2172260A
JP2301154A
JP4838112B1
Attorney, Agent or Firm:
京本 直樹 (外2名)