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Patent Searching and Data


Title:
【発明の名称】汚濁洗浄液の蒸留再生装置
Document Type and Number:
Japanese Patent JP2891660
Kind Code:
B2
Inventors:
UCHINO MASAHIDE
Application Number:
JP25129695A
Publication Date:
May 17, 1999
Filing Date:
September 28, 1995
Export Citation:
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Assignee:
JAPAN FUIIRUDO KK
International Classes:
B01D5/00; B01D3/00; D06F43/08; H01L21/304; (IPC1-7): B01D5/00; B01D3/00
Domestic Patent References:
JP7136404A
JP557101A
JP63302903A
JP59189902A
JP7171301A
JP53114777A
JP177807U
JP560501U
Attorney, Agent or Firm:
Osamu Shimizu