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Patent Searching and Data


Title:
【発明の名称】マイクロ波プラズマ装置
Document Type and Number:
Japanese Patent JP2920852
Kind Code:
B2
Inventors:
IMAHASHI KAZUNARI
ISHII NOBUO
Application Number:
JP16342491A
Publication Date:
July 19, 1999
Filing Date:
June 10, 1991
Export Citation:
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Assignee:
TOKYO EREKUTORON KK
International Classes:
C23F4/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; C23F4/00; H01L21/205
Domestic Patent References:
JP6464221A
JP6481321A
JP62254834A
JP61258428A
JP4299826A
Attorney, Agent or Firm:
中本 菊彦