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Patent Searching and Data


Title:
両面パターニング方法およびその装置
Document Type and Number:
Japanese Patent JP3071635
Kind Code:
B2
Inventors:
上村 邦夫
勝 友治
島田 啓二
Application Number:
JP12909194A
Publication Date:
July 31, 2000
Filing Date:
June 10, 1994
Export Citation:
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Assignee:
シャープ株式会社
International Classes:
H01L21/28; H01L21/285; H01L21/68; H01L21/683; H01L31/04; (IPC1-7): H01L21/285; H01L21/68; H01L31/04
Attorney, Agent or Firm:
小森 久夫