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Title:
硬質カーボン膜形成方法及び形成装置
Document Type and Number:
Japanese Patent JP3106528
Kind Code:
B2
Inventors:
岡田 繁信
Application Number:
JP7388591A
Publication Date:
November 06, 2000
Filing Date:
March 12, 1991
Export Citation:
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Assignee:
株式会社島津製作所
International Classes:
C23C16/26; C23C16/50; C23C16/511; (IPC1-7): C23C16/26; C23C16/511
Attorney, Agent or Firm:
小野 由己男 (外1名)



 
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