Title:
【発明の名称】球状シリカ微粒子製造用バーナー
Document Type and Number:
Japanese Patent JP3322538
Kind Code:
B2
Inventors:
Hisashi Otsuka
Kazuo Shirota
Kazuo Shirota
Application Number:
JP27049895A
Publication Date:
September 09, 2002
Filing Date:
September 25, 1995
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
F23D14/32; C03B8/04; C03B19/10; C03B19/14; F23D14/22; (IPC1-7): F23D14/32; C03B8/04; F23D14/22
Domestic Patent References:
| JP7187683A | ||||
| JP7138028A | ||||
| JP62187135A | ||||
| JP7187684A | ||||
| JP231010B2 | ||||
| JP57326B2 |
Attorney, Agent or Firm:
High Toshihiko No (1 person outside)