Title:
X線マスクおよびX線マスクの製造方法
Document Type and Number:
Japanese Patent JP3586491
Kind Code:
B2
Inventors:
Hideki Yabe
Kenji Marumoto
Koji Yoshise
Atsushi Aya
Yasuji Matsui
Kei Sasaki
Kenji Marumoto
Koji Yoshise
Atsushi Aya
Yasuji Matsui
Kei Sasaki
Application Number:
JP3513195A
Publication Date:
November 10, 2004
Filing Date:
February 23, 1995
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G03F1/22; G03F1/40; G03F1/68; G03F1/80; H01L21/027; H01L21/302; H01L21/3065; (IPC1-7): H01L21/027; G03F1/08; G03F1/16
Domestic Patent References:
| JP4142023A | ||||
| JP5198482A | ||||
| JP63120420A | ||||
| JP3265857A | ||||
| JP3204919A | ||||
| JP6029194A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Hiroyuki Yoshida
Hidehiko Ito
Toshio Morita
Hiroyuki Yoshida
Hidehiko Ito